2010
DOI: 10.1063/1.3280044
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High-Q conical polymeric microcavities

Abstract: We report on the fabrication of high-Q microresonators made of low-loss, thermoplastic polymer poly(methyl methacrylate) (PMMA) directly processed on a silicon substrate. Using this polymer-on-silicon material in combination with a thermal reflow step enables cavities of conical geometry with an ultrasmooth surface. The cavity Q factor of these PMMA resonators is above 2×106 in the 1300 nm wavelength range. Finite element simulations show the existence of a variety of “whispering gallery” modes in these resona… Show more

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Cited by 99 publications
(53 citation statements)
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References 23 publications
(15 reference statements)
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“…For microdisks with thicknesses above 3 µm the surface-scattering loss of the WGMs at the top and bottom microdisk surface becomes negligible. Q factors above 10 6 are comparable to values achieved in polymeric microcavities fabricated by replica molding [7,8] and by thermal reflow techniques [9,10], making DLW a competitive fabrication technique with the additional advantage of a high degree of design freedom.…”
Section: Optical Characterization Of Passive Microcavitiessupporting
confidence: 52%
See 1 more Smart Citation
“…For microdisks with thicknesses above 3 µm the surface-scattering loss of the WGMs at the top and bottom microdisk surface becomes negligible. Q factors above 10 6 are comparable to values achieved in polymeric microcavities fabricated by replica molding [7,8] and by thermal reflow techniques [9,10], making DLW a competitive fabrication technique with the additional advantage of a high degree of design freedom.…”
Section: Optical Characterization Of Passive Microcavitiessupporting
confidence: 52%
“…The combination of long photon lifetime with the advantages of polymers, such as low material cost and easy doping, make them potentially attractive for a wide range of applications. In order to achieve high-Q polymeric microcavities via lithographic structuring, techniques like replica molding [7,8] and thermal-reflow methods with surface-tension induced cavity geometries [9,10] have been investigated. These methods allow for smooth cavity surfaces with reduced lithographic blemishes, which typically limit the Q factors of the WGMs due to surface scattering loss.…”
Section: Introductionmentioning
confidence: 99%
“…Besides high optical transparency, polymers are favorable for laser device fabrication due to large scale (soft-)lithographic structuring techniques, low material costs and simple doping with a broad variety of gain media. Currently, by either direct lithographic fabrication and subsequent surface tension-enhanced thermal reflow [7] or replica molding of an ultra-high-Q master [8], Q factors above 10 6 have been achieved in planar (on-chip), polymeric WGMmicroresonators.…”
Section: Introductionmentioning
confidence: 99%
“…11 These resonators are compatible with large-scale fabrication and are mechanically stable. Tunability of the cavity resonances is linked to the control of the resonator diameter.…”
Section: Sample Fabricationmentioning
confidence: 89%