High-Q Slow-Wave Coplanar Transmission Lines on 0.35 $\mu$m CMOS Process

Kaddour, Darine; Issa, H.; Franc, Anne-Laure; Corrao, N.; Pistono, Emmanuel; Podevin, Florence; Fournier, Jean‐Michel; Duchamp, Jean‐Marc; Ferrari, Philippe

doi:10.1109/lmwc.2009.2027053

Cited by 48 publications

(24 citation statements)

References 13 publications

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“…The transmission line used is a high-Q slow-wave coplanar transmission line [29]. The differential lines (CPW line) are on the top metal layer and the floating metal strips are on the lower metal layer.…”

Section: Experimental Results and Comparisonsmentioning

confidence: 99%

An Efficient High-Frequency Linear RF Amplifier Synthesis Method Based on Evolutionary Computation and Machine Learning Techniques

Liu

Deferm

Zhao

et al. 2012

IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst.

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Abstract-Existing radio frequency (RF) integrated circuit (IC) design automation methods focus on the synthesis of circuits at a few GHz, typically less than 10 GHz. That framework is difficult to apply to RF IC synthesis at mm-wave frequencies (e.g., 60-100 GHz). In this paper, a new method, called efficient machine learning-based differential evolution, is presented for mm-wave frequency linear RF amplifier synthesis. By using electromagnetic (EM) simulations to evaluate the key passive components, the evaluation of circuit performances is accurate and solves the limitations of parasitic-included equivalent circuit models and predefined layout templates used in the existing synthesis framework. A decomposition method separates the design variables that require expensive EM simulations and the variables that only need cheap circuit simulations. Hence, a lowdimensional expensive optimization problem is generated. By the newly proposed core algorithm integrating adaptive population generation, naive Bayes classification, Gaussian process and differential evolution, the generated low-dimensional expensive optimization problem can be solved efficiently (by the online surrogate model), and global search (by evolutionary computation) can be achieved. A 100 GHz three-stage differential amplifier is synthesized in a 90 nm CMOS technology. The power gain reaches 10 dB with more than 20 GHz bandwidth. The synthesis costs only 25 h, having a comparable result and a nine times speed enhancement compared with directly using the EM simulator and global optimization algorithms.

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Section: Experimental Results and Comparisonsmentioning

confidence: 99%

An Efficient High-Frequency Linear RF Amplifier Synthesis Method Based on Evolutionary Computation and Machine Learning Techniques

Liu

Deferm

Zhao

et al. 2012

IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst.

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“…It is formed by a porous membrane filled with vertical metallic nanowires short-circuited to a ground plane, covered by a dielectric layer, on which the circuits are patterned, as shown in Figure l. Similarly to other slow-wave TLines [3][4][5], in the proposed IlTL the electric field is mainly concentrating in the dielectric material close to the microstrip in Fig. 1, while the magnetic field extends in the whole substrate.…”

Section: Principlementioning

confidence: 97%

“…Considerable effort has been invested in the past few years to develop high quality passive components in CMOS and BiCMOS technologies. As an example, high-performance slow-wave TLines, mostly CPW, have been successfully demonstrated in CMOS using the metallic interconnections of the BEOL, [3][4][5]. Despite the lower losses and the miniaturization provided by this type of TLine, the dimensions of the passive components remain significant, and since the In view of this problem, 3D integration techniques have been developed worldwide to combine multiple chips of different technologies on a common substrate, the "interposer".…”

Section: Introductionmentioning

confidence: 99%

Metallic nanowire filled membrane for slow wave microstrip transmission lines

Franc¹,

Podevin²,

Cagnon³

et al. 2012

2012 International Semiconductor Conference Dresden-Grenoble (ISCDG)

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A new concept of slow wave microstrip transmission lines (SW IlTL) dedicated to mmW and sub-mmW applications (100 GHz and further) is described herein. The microstrip is deposited on a specific substrate consisting in a metallic nanowires-filled membrane (MnM) of alumina covered with a thin top layer of silicon oxide. The slow wave effect is obtained thanks to metallic nanowires that capture the electric field while the magnetic field can extend in the whole substrate. Despite of the strong miniaturization expected, such SW IlTLs should reach a quality factor five times higher than the one obtained with a conventional microstrip line (without nanowires). Such SW IlTL can act as interconnecting paths if the MnM substrate is used as a 3D-interposer.

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“…The aim of this letter is to highlight the potential of patterned S-CPW to improve the measurement sensitivity compared to classical characterization methods. Since its first convincing results in CMOS technologies [3], the patterned shielded CPW topology has shown very high performance in various integrated technologies [4]- [6]. The principle of the proposed method is first explained.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Thin Dielectric Films up to Mm-Wave Frequencies Using Patterned Shielded Coplanar Waveguides

Franc

Pistono

Ferrari

2012

IEEE Microw. Wireless Compon. Lett.

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This letter presents an original method based on Patterned Shielded CoPlanar Waveguides transmission lines (patterned S-CPW TLines) for the wideband characterization of thin dielectric materials, up to millimeter-wave frequencies. The proposed method is easy to use and a very promising candidate to reach a better precision than classical methods. The dynamic for the relative permittivity (respectively the dielectric loss tangent) determination is 3.8 times (respectively, 1.9 times) higher compared to classical methods. The method is experimentally validated by the characterization of a thin SiO 2 layer (1 m).Index Terms-Thin dielectric film characterization, TLine.

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High-Q Slow-Wave Coplanar Transmission Lines on 0.35 $\mu$m CMOS Process

Cited by 48 publications

References 13 publications

An Efficient High-Frequency Linear RF Amplifier Synthesis Method Based on Evolutionary Computation and Machine Learning Techniques

An Efficient High-Frequency Linear RF Amplifier Synthesis Method Based on Evolutionary Computation and Machine Learning Techniques

Metallic nanowire filled membrane for slow wave microstrip transmission lines

Characterization of Thin Dielectric Films up to Mm-Wave Frequencies Using Patterned Shielded Coplanar Waveguides

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