High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

Torres, Francis; Meng, Phillip; Li, Ju; Zhao, C.; Blair, David; Liu, Kaiyu; Chao, S.; Martyniuk, Mariusz; Roch‐Jeune, Isabelle; Flaminio, R.; Michel, C.

doi:10.1063/1.4812731

Cited by 7 publications

(8 citation statements)

References 24 publications

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“…We measured the mode frequencies and qualityfactors of resonators without coating using an optical lever and piezo excitation system [28]. Qualityfactors in the range 5.0 × 10 5 -8.6 × 10 5 were observed, reasonably close to our design goal.…”

Section: Silicon Resonator With Optical Coatingssupporting

confidence: 61%

“…(1) and the parameters reported above, the OAPA achieves R 1 with an incident power ∼1.6 μW (cavity finesse of 6.3 × 10 4 , Q 0 Q 1 1.3 × 10 10 , and Λ 0.1, resonator effective mass m 1.17 mg, and experimentally observed [28] Q m 7.5 × 10 5 ). Figure 5 shows the predicted parametric gain as a function of input power.…”

Section: Predicted Performance Of a Practical Nsi Cavity Setupmentioning

confidence: 80%

“…Wafer thickness of 365, ∼500, and 670 μm were used. For the design presented here, we will focus on a resonator with observed frequency 401.5 kHz and thickness 515 μm [28].…”

Section: Silicon Resonator With Optical Coatingsmentioning

confidence: 99%

“…This paper presents the design and predicted performance of a practical OAPA device developed from the concept first presented in [26]. We present the design and validation studies of a compact tunable OAPA system based on a Fabry-Perot [27] cavity with a high quality-factor mg-scale silicon microresonator [28] as an end mirror. This could also provide a platform for studying parametric instability, an important issue in advanced gravitational-wave detectors [19].…”

Section: Introductionmentioning

confidence: 99%

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Near-self-imaging cavity for three-mode optoacoustic parametric amplifiers using silicon microresonators

Liu

Torres

et al. 2014

Appl. Opt.

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Three-mode optoacoustic parametric amplifiers (OAPAs), in which a pair of photon modes are strongly coupled to an acoustic mode, provide a general platform for investigating self-cooling, parametric instability and very sensitive transducers. Their realization requires an optical cavity with tunable transverse modes and a high quality-factor mirror resonator. This paper presents the design of a table-top OAPA based on a near-self-imaging cavity design, using a silicon torsional microresonator. The design achieves a tuning coefficient for the optical mode spacing of 2.46 MHz∕mm. This allows tuning of the mode spacing between amplification and self-cooling regimes of the OAPA device. Based on demonstrated resonator parameters (frequencies ∼400 kHz and quality-factors ∼7.5 × 10 5 ) we predict that the OAPA can achieve parametric instability with 1.6 μW of input power and mode cooling by a factor of 1.9 × 10 4 with 30 mW of input power.

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Section: Silicon Resonator With Optical Coatingssupporting

confidence: 61%

Section: Predicted Performance Of a Practical Nsi Cavity Setupmentioning

confidence: 80%

“…Wafer thickness of 365, ∼500, and 670 μm were used. For the design presented here, we will focus on a resonator with observed frequency 401.5 kHz and thickness 515 μm [28].…”

Section: Silicon Resonator With Optical Coatingsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Near-self-imaging cavity for three-mode optoacoustic parametric amplifiers using silicon microresonators

Liu

Torres

et al. 2014

Appl. Opt.

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“…As for optical microsystems, several groups have indeed explored designs of micromirrors oscillating in the range of frequencies we are considering [37][38][39][40]. In all cases, it is evident that it is very difficult to satisfy, at the same time, all the technological requirements necessary for the observation of quantum effects.…”

Section: Design Rationalementioning

confidence: 99%

Low-Loss Optomechanical Oscillator for Quantum-Optics Experiments

et al. 2015

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We present an oscillating micromirror with mechanical quality factors Q up to 1.2 × 10 6 at cryogenic temperature and optical losses lower than 20 ppm. The device is specifically designed to ease the detection of ponderomotive squeezing (or, more generally, to produce a cavity quantum optomechanical system) at frequencies of about 100 kHz. The design allows one to keep under control both the structural loss in the optical coating and the mechanical energy leakage through the support. The comparison between devices with different shapes shows that the residual mechanical loss at 4.2 K is equally contributed by the intrinsic loss of the silicon substrate and of the coating, while at higher temperatures the dominant loss mechanism is thermoelasticity in the substrate. As the modal response of the device is tailored for its use in optical cavities, these features make the device very promising for quantum-optics experiments.

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Dynamical back‐action effects in low loss optomechanical oscillators

et al. 2014

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The problem of the stability of a cavity optomechanical system based on an oscillator having at the same time low optical and mechanical losses is addressed. As it is the aim to extend the use of optical squeezing as a tool for improving quantum limited displacement sensing at low frequency, a family of opto-mechanical devices designed to work at frequencies of about 100 kHz was developed . The devices actually meet the initial design goals, but new requirements have emerged from the analysis of their behavior in optical cavities, due to the interaction between the cavity locking system and the low order normal modes of the devices.The optomechanics field of research has been gathering a lot of momentum during the last couple of years, driven by the achievement of long-awaited experimental results. For example, micro-and nano-oscillators can now be cooled down to an occupation number below unity, or very close to it, opening up the possibility to observe quantum phenomena [1][2][3][4][5][6].We are particularly interested in optical squeezing as a tool for improving quantum limited displacement sensing [7] in the audio-band, in particular for improving the sensitivity of gravitational wave interferometers [8]. Experiments have recently achieved squeezing around the mechanical resonance in the MHz range, using a silicon nanomechanical resonator [9], and a thin semi-transparent membrane within a Fabry-Pérot cavity [10]. At lower frequencies however, various sources of technical noise, such as thermal noise, phase/frequency noise associated with the input field and/or the slow cavity fluctuations, have detrimental effects on the manifestation of quantum phenomena, making lowfrequency ponderomotive squeezing much more difficult to achieve. As a first step, we are addressing these problems by developing a family of opto-mechanical devices specifically designed to ease the detection of pondero-motive squeezing (or, more generally, to produce a cavity quantum optomechanical system) at frequencies of about 100 kHz.Our approach is focused on relatively thick silicon oscillators with high reflectivity coating [11]. The relatively high mass (about 100 μg) of our devices is compensated by the capability to manage high power at low temperatures (down to 1 K), owing to a favorable geometric factor (thick connectors) and the excellent thermal conductivity of silicon crystals at cryogenic temperature. We point out that most of the schemes designed to detect quantum properties of light cannot take advantage from laser cooling of the mechanical oscillator involved in the measurement. Therefore, a low thermal noise background is required (i.e., low temperature), together with a weak interaction between the oscillator and its thermal bath (i.e., high mechanical quality factors Q).In such devices, the mirror coatings must provide high reflectivity and low losses, as radiation-pressure

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High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers

Cited by 7 publications

References 24 publications

Near-self-imaging cavity for three-mode optoacoustic parametric amplifiers using silicon microresonators

Near-self-imaging cavity for three-mode optoacoustic parametric amplifiers using silicon microresonators

Low-Loss Optomechanical Oscillator for Quantum-Optics Experiments

Dynamical back‐action effects in low loss optomechanical oscillators

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