High quality femtosecond laser cutting of alumina substrates

Wang, X.C.; Zheng, Hui; Chu, PL; Tan, Jun; Teh, Kim Ming; Liu, T.; Ang, Bryden C.Y.; Tay, G.H.

doi:10.1016/j.optlaseng.2010.02.001

Cited by 64 publications

(16 citation statements)

References 11 publications

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“…Furthermore, there is a consistent trend for miniaturization of new and existing devices that drives the advances in laser micro-machining. Efforts to achieve high geometrical accuracy, especially to minimize the tapering effect on side walls of structures fabricated by laser micro-machining, was the focus of many investigations, and different approaches to address this issue were suggested by researchers [10][11][12][13][14]. The main difficulties with these solutions are either the high accuracy requirements for the movements of mechanical stages, or their low repeatability and also their applicability for only specific structures.…”

Section: Gaussian Beam Processingmentioning

confidence: 99%

Effects of Top-hat Laser Beam Processing and Scanning Strategies in Laser Micro-Structuring

Penchev

Henrottin³

et al. 2020

Micromachines

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The uniform energy distribution of top-hat laser beams is a very attractive property that can offer some advantages compared to Gaussian beams. Especially, the desired intensity distribution can be achieved at the laser spot through energy redistribution across the beam spatial profile and, thus, to minimize and even eliminate some inherent shortcomings in laser micro-processing. This paper reports an empirical study that investigates the effects of top-hat beam processing in micro-structuring and compares the results with those obtainable with a conventional Gaussian beam. In particular, a refractive field mapping beam shaper was used to obtain a top-hat profile and the effects of different scanning strategies, pulse energy settings, and accumulated fluence, i.e., hatch and pulse distances, were investigated. In general, the top-hat laser processing led to improvements in surface and structuring quality. Especially, the taper angle was reduced while the surface roughness and edge definition were also improved compared to structures produced with Gaussian beams. A further decrease of the taper angle was achieved by combining hatching with some outlining beam passes. The scanning strategies with only outlining beam passes led to very high ablation rates but in expense of structuring quality. Improvements in surface roughness were obtained with a wide range of pulse energies and pulse and hatch distances when top-hat laser processing was used.

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Section: Gaussian Beam Processingmentioning

confidence: 99%

Effects of Top-hat Laser Beam Processing and Scanning Strategies in Laser Micro-Structuring

Penchev

Henrottin³

et al. 2020

Micromachines

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“…In case of ceramics these processes have been shown in literature over the last decades. More specifically, cutting 50 of alumina with femtosecond-laser pulses and cutting speed up to 143 µm s −1 has been reported [15,16]. Moreover, machining of yttria tetragonal zirconia polycrystalline ceramic with an ablation rate of up to 1.35 mm min −3 and a surface roughness of R a =2.8 µm was shown [17].…”

Section: Introductionmentioning

confidence: 99%

“…The degradation is minimal at body temperature condition [5,6], inhibiting inflammation [7]. Moreover, this ceramic is electrically insulating and a poor thermal conductor and therefore well suited 15 for bio applications. The characteristic mechanical features of ATZ ceramics are a high fatigue strength, a Young's modulus of 160 GPa, ultimate tensile strength of 2 GPa and hardness of 1400 Vickers.…”

Section: Introductionmentioning

confidence: 99%

Ultrashort-Pulsed Laser Machining of Dental Ceramic Implants

Ackerl¹,

Warhanek²,

Gysel³

et al. 2018

Preprint

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A novel approach for machining of cylindrical hard materials and arbitrary shapes is presented. Alumina-toughened zirconia dental implants with complex geometry are manufactured with femtosecond quasi-tangential laser ablation. This rapid-prototyping approach for small-scale production decreases the development-time cycle tremendously and trumps conventional approaches. Moreover, a competitive parameter study for radial and tangential ablation with single and multi-pulse is presented. A process achieving an ablation rate of 1mm3/min with a surface roughness Ra of 0.2 µm is introduced. The meta-stable tetragonal phase of the ceramic persists and is assessed via Raman spectroscopy. The small heat-affected zone is subsequently ablated with a radial laser process step. Hence, high-precision dental implants with a mean error of smaller 5 µm over the complete contour are shown.

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“…Although the processing speeds can be considerably lower due to used lower power levels, the process is a viable tool for thin sheet cutting [15]. More preferably pulsed solid state lasers are used, where pulse durations vary between fs to ns ranges [16][17][18]. Exploration of different wavelengths is also an important point to be addressed to control the laser-matter interaction better especially when multiple layered materials are concerned.…”

Section: Introductionmentioning

confidence: 99%

Remote cutting of Li-ion battery electrodes with infrared and green ns-pulsed fibre lasers

Demir

Previtali

2014

Int J Adv Manuf Technol

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Thin sheet anode and cathode materials made in composite structures constitute some of the most important components of a Li-ion battery. These materials are currently cut by punching technology, which shows degrading behaviour as the tool wears out. A viable option for Li-ion battery electrode manufacturing is the use of remote laser cutting. However the operation requires fulfilling both productivity and quality aspects to substitute the conventional production method. One of the most critical aspects in quality is the clearance width, which is defined as the extent of the exposed middle layer of the sandwich at the laser cut kerf. This work investigates the quality aspects of laser cutting of Li-ion electrodes when a green fiber laser source (λ=532 nm, τ=1 ns) is used rather than the more traditional infrared (IR) fiber laser source (λ=1064 nm, τ=250 ns). The processing conditions were investigated to reveal the technological feasibility zones. Clearance width was studied within the technological feasibility zones for all the material-laser combinations. Results showed that high productivity criterion is met by the IR system, since cutting speed could reach 30 m/min with 54W average laser power on both anode and cathode. On the other hand, the green laser provided clearance width below 20 µm. In the best case the clearance on anode could be eliminated with the green laser system. Although the maximum cutting speed was 4.5 m/min, upscaling of green laser power can provide required productivity.

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High quality femtosecond laser cutting of alumina substrates

Cited by 64 publications

References 11 publications

Effects of Top-hat Laser Beam Processing and Scanning Strategies in Laser Micro-Structuring

Effects of Top-hat Laser Beam Processing and Scanning Strategies in Laser Micro-Structuring

Ultrashort-Pulsed Laser Machining of Dental Ceramic Implants

Remote cutting of Li-ion battery electrodes with infrared and green ns-pulsed fibre lasers

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