High-reliability circular-contact RF MEMS switches in silicon hermetic package

Jiang, Lili; Ma, Nan; Wang, Li Feng; Huang, Xinghe

doi:10.1088/1361-6439/accc3c

Cited by 4 publications

(3 citation statements)

References 32 publications

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Section: Types Of Mems Switchesmentioning

confidence: 99%

“…The different mechanical structures such as cantilever, clamped-clamped, and diaphragm structures are the most utilized structures [109,110]. The meanders of different shapes and holes with different shapes have been introduced to further improve performance of the designed switches [111][112][113][114]. In MEMS switches, the most utilized actuation methods are electrostatic, electrothermal, electromagnetic, piezoelectric, and SMA [97,[115][116][117][118][119].…”

Section: Geometric Constraintsmentioning

confidence: 99%

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MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

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Section: Types Of Mems Switchesmentioning

confidence: 99%

Section: Geometric Constraintsmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

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Section: Introductionmentioning

confidence: 99%

A review of research on RF MEMS for metaverse interactions

Nan,

Jia,

et al. 2024

J. Micromech. Microeng.

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Metaverse as a comprehensive integration of multiple digital technologies of the new generation, enables human beings to bring unprecedented immersive experiences with the support of virtual reality, augmented reality, blockchain, digital twin, Artificial Intelligence, haptic IoT, and human-computer interaction. In view of the urgent need for high-speed and high-capacity data transmission as well as high integration, RF MEMS devices have become the core components for metaverse system building due to their advantages of miniaturization, high integration, and low power consumption. Playing a pivotal role in real-time high-capacity data transmission and signal processing in metaverse interactive systems, the low cost and high performance of RF MEMS devices have once again become the focus of attention for people from all walks of life. Therefore, this paper focuses on the working principles and performance optimization of RF MEMS devices. Firstly, the classification and basic principles of RF MEMS devices are introduced, followed by the advanced fabrication technology and optimization scheme of MEMS devices, and then the advanced applications of RF MEMS devices in the field of metaverse are discussed in focus, including IoT mobile communication, Artificial Intelligence, and flexible wearables. Finally, the prospects and potential challenges for the development of RF MEMS devices interacting with the metaverse are summarized and discussed.

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