High resolution 50 nm linear displacement macroscale meander-line PZT actuator

Ferroelectric thin films for micro-sensors and actuators: a review

“…While the early work on PZT thin-film actuators [3] still suffered from integration problems, more recently a number of devices have successfully been fabricated and characterized. Among the piezoelectric devices, these include cantilever actuators [4,5], probes for atomic force microscopy [6], ultrasonic micromotors [7,8], micropumps [9], ultrasonic transducers for medical applications [10], and linear actuators [11]. The PZT solid-solution system also contains compositions with fairly good pyroelectric properties (x < 0.3).…”

PZT Thin-Film Meso- and Micro Devices

“…A major technical challenge is to find a minute actuator that has large enough actuation strength while scanning at a high frequency, such as 5-15 kHz or more. According to [6], there are four types of microactuators: thermal [7][8][9][10], shape-memory-alloy (SMA) [6], electrostatic [11][12], and piezoelectric (specifically PZT) [13][14][15][16]. Thermal and SMA actuators have low frequency bandwidth [6] (<1 kHz), whereas electrostatic and PZT actuators have high frequency bandwidth (>1 kHz).…”

“…Based on these considerations, the best design choice for the nextgeneration scanning endoscopes is PZT microactuators. Despite the needs for PZT microactuators, miniaturization of bulk PZT actuators into millimeter or micron ranges is not trivial [13][14][15][16]. Traditional bulk PZT often appears as thin patches with thickness no less than 80 µm [17].…”

Ferroelectric films for MEMS type devices using novel hybrid processing technology

“…While the early work on PZT thin-film actuators [ 127] still suffered from integration problems, more recently a number of devices have successfully been fabricated and characterized. Among the piezoelectric devices, these include cantilever actuators[ 128, 129], probes for atomic force microscopy [ 130], ultrasonic micromotors [ 13 1, 1321, micropumps[ 133], ultrasonic transducers for medical applications [I 141, and linear actuators[134].…”