High-resolution current mode interface for MEMS piezoresistive pressure sensor

Kishore, Kaushal; Kumar, S. Santosh; Mukhiya, Ravindra; Akbar, Sheikh A.

doi:10.1016/j.aeue.2021.153707

Cited by 8 publications

(3 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In 1995, Bergveld first introduced the possibility of large-scale equipment miniaturization for chemical analysis [9]. As MEMS devices are currently present in all aspects of the daily life (e.g., image [10], touch [11,12], distance [13], pressure [14][15][16][17][18], temperature [19][20][21], and humidity [22][23][24][25] sensors, microphones [26][27][28][29], gyroscopes [30][31][32][33], accelerometers [34][35][36][37], and magnetometers [38][39][40]), the worldwide MEMS market is expected to grow to $25 billion by 2022 (Figure 1) [3,4,[41][42][43]. Reprinted from an open-access source [43].…”

Section: Introductionmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

View full text Add to dashboard Cite

The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the biomedical field, especially in drug synthesis and delivery, microsurgery, microtherapy, diagnostics and prevention, artificial organs, genome synthesis and sequencing, and cell manipulation and characterization. Their tremendous potential resides in the advantages offered by their reduced size, including ease of integration, lightweight, low power consumption, high resonance frequency, the possibility of integration with electrical or electronic circuits, reduced fabrication costs due to high mass production, and high accuracy, sensitivity, and throughput. In this context, this paper aims to provide an overview of MEMS technology by describing the main materials and fabrication techniques for manufacturing purposes and their most common biomedical applications, which have evolved in the past years.

show abstract

Section: Introductionmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

View full text Add to dashboard Cite

show abstract

“…So far, several attempts of designing and optimization via the modelling of piezoresistive pressure sensors have been made; however, they are all limited to the detection of gas pressure by incorporating a sensitive diaphragm [36][37][38][39]. Currently, there has been no successful effort in the design optimization of contact piezo-resistive pressure sensors suitable for mounting on the skin to detect weak human physiological signals via a completely wearable setup.…”

Section: Introductionmentioning

confidence: 99%

Design Rules for a Wearable Micro-Fabricated Piezo-Resistive Pressure Sensor

et al. 2022

View full text Add to dashboard Cite

Wearable flexible piezo-resistive pressure sensors hold a wide-ranging potential in human health monitoring, electronic skin, robotic limbs, and other human–machine interfaces. Out of the most successful recent efforts for arterial pulse monitoring are sensors with micro-patterned conductive elastomers. However, a low-current output signal (typically in the range of nano-amperes) and bulky and expensive measurement equipment for useful signal acquisition inhibits their wearability. Herein, through a finite element analysis we establish the design rules for a highly sensitive piezo-resistive pressure sensor with an output that is high enough to be detectable by simple and inexpensive circuits and therefore ensure wearability. We also show that, out of four frequently reported micro-feature shapes in micro-patterned piezo-resistive sensors, the micro-dome and micro-pyramid yield the highest sensitivity. Furthermore, investigations of different conductivity values of micro-patterned elastomers found that coating the elastomer with a conductive material (usually metallic) leads to higher current response when compared to composited conductive elastomers. Finally, the geometric parameters and spatial configurations of micro-pyramid design of piezo-resistive sensors were optimized. The results show that an enhanced sensitivity and higher current output is achieved by the lower spatial density configuration of three micro-features per millimeter length, a smaller feature size of around 100 μm, and a 60–50 degrees pyramid angle.

show abstract

“…With the vigorous development of artificial intelligence and wearable devices, there is an increase in the demand for thin, lightweight, and high-performance flexible pressure sensors due to their promising applications in E-skin, human–machine interactions, biophysical monitoring, etc. − Flexible pressure sensors are mainly fabricated based on the following sensing mechanisms: triboelectricity, piezoelectricity, capacitance, and piezoresistivity. − Among these, piezoresistive pressure sensors, which can transduce the applied pressure signals into the resistance signals, have been widely adopted, owing to their high accuracy, simple structure and measurement scheme, and low manufacturing cost. Moreover, flexible pressure sensors are commonly made of composite materials by mixing elastic polymers with conductive nanomaterials.…”

mentioning

confidence: 99%

Crack-Across-Pore Enabled High-Performance Flexible Pressure Sensors for Deep Neural Network Enhanced Sensing and Human Action Recognition

et al. 2022

View full text Add to dashboard Cite

Flexible pressure sensors with high sensitivity over a broad pressure range are highly desired, yet challenging to build to meet the requirements of practical applications in daily activities and more significant in some extreme environments. This work demonstrates a thin, lightweight, and high-performance pressure sensor based on flexible porous phenyl-silicone/functionalized carbon nanotube (PS/FCNT) film. The formed crack-across-pore endows the pressure sensor with high sensitivity of 19.77 kPa–1 and 1.6 kPa–1 in the linear range of 0–33 kPa and 0.2–2 MPa, respectively, as well as ultralow detection limit (∼1.3 Pa). Furthermore, the resulting pressure sensor possesses a low fatigue over 4000 loading/unloading cycles even under a high pressure of 2 MPa and excellent durability (>6000 cycles) after heating at high temperature (200 °C), attributed to the strong chemical bonding between PS and FCNT, excellent mechanical stability, and high temperature resistance of PS/FCNT film. These superior properties set a foundation for applying the single sensor device in detecting diverse stimuli from the very low to high pressure range, including weak airflow, sway, vibrations, biophysical signal monitoring, and even car pressure. Besides, a deep neural network based on transformer (TRM) has been engaged for human action recognition with an overall classification rate of 94.96% on six human actions, offering high accuracy in real-time practical scenarios.

show abstract

High-resolution current mode interface for MEMS piezoresistive pressure sensor

Cited by 8 publications

References 30 publications

Microelectromechanical Systems (MEMS) for Biomedical Applications

Microelectromechanical Systems (MEMS) for Biomedical Applications

Design Rules for a Wearable Micro-Fabricated Piezo-Resistive Pressure Sensor

Crack-Across-Pore Enabled High-Performance Flexible Pressure Sensors for Deep Neural Network Enhanced Sensing and Human Action Recognition

Contact Info

Product

Resources

About