1997
DOI: 10.1063/1.363838
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High-resolution grazing-incidence x-ray diffraction for characterization of defects in crystal surface layers

Abstract: The peculiarities of high-resolution measurements in grazing-incidence diffraction ͑GID͒ are studied, both theoretically and experimentally. It is shown that complete discrimination between coherent reflection and diffuse scattering due to defects in GID requires a three-dimensional mapping of reciprocal space. These measurements can be performed using a combination of analyzer crystal and position-sensitive detector for angular analysis of scattered x-rays in mutually perpendicular planes. The equations for t… Show more

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Cited by 17 publications
(9 citation statements)
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“…Grazing-incidence XRD was also performed to provide a depth profile information of the thin films and the analysis of amorphous, polycrystallinity and epitaxial thin films [37]. In this geometry, the X-ray beam irradiates the sample surface at a grazing incidence slightly larger than the critical angle of total reflection.…”
Section: Methodsmentioning
confidence: 99%
“…Grazing-incidence XRD was also performed to provide a depth profile information of the thin films and the analysis of amorphous, polycrystallinity and epitaxial thin films [37]. In this geometry, the X-ray beam irradiates the sample surface at a grazing incidence slightly larger than the critical angle of total reflection.…”
Section: Methodsmentioning
confidence: 99%
“…Следует отметить, что попытки построения теоретических моде-лей скользящей дифракции в дефектных кристаллах предприни-мались ранее (например, [9][10][11]), однако последовательная дина-мическая теория пока отсутствует. В данной работе разработан ме-тод расчета диффузного рассеяния при скользящей рентгеновской дифракции в кристалле с дефектами типа центров дилатации.…”
Section: постановка задачиunclassified
“…Such a technique is called the grazing diffraction. For polycrystalline materials, this technique allows examining the structure, phase composition and microstructure of thin subsurface layer [75] and estimating the surface purity and roughness [76]; for thin films and epitaxial layers -diagnosing the heterostructures [77,78] even during their growth.…”
Section: High Resolution Diffraction Experimentsmentioning
confidence: 99%