High-resolution magnetic Co supertips grown by a focused electron beam

Abstract

We present a technique for local growth of high-resolution, high-aspect-ratio magnetic tips and thin adherent magnetic cap coatings on top of batch fabricated scanning force microscopy silicon tips. A focused electron beam of a scanning electron microscope is used for decomposition of a directed cobalt carbonyl vapor flux. Exposure parameters determine the tip geometry and tip length. Deposits consist of cubic Co clusters of 2–5 nm in size dispersed in a stabilizing carbonaceous matrix. Magnetic force microscope sensors having magnetic tip apex diameters between 50 and 240 nm were produced. Tracks of magnetic transitions written in recording media of hard disks were used to characterize tip performance.

Comparative Study of Cu-Precursors for 3D Focused Electron Beam Induced Deposition

“…Summarized precursor properties: vapor pressure "P vap …, estimated flux at nozzle exit, ligand dissociation temperature "T diss …, and minimum CVD temperature "T min ) to obtain films with electrical resistivity Ë2. 5 vertical deposition rate superposed with the constant lateral scan speed evolves into a horizontal rod shape. When the focused electron beam partially advances in front of the deposit or gets transmitted through the horizontal rod end volume it hits again the substrate and a new deposit starts.…”

Submicrometer Hall devices fabricated by focused electron-beam-induced deposition

“…5 Magnetic materials show additional "Hall phenomena" which are, generally speaking, generated by spin-orbit interactions: the so-called extraordinary [10][11][12][13][14][15][16] and planar Hall effects. [17][18][19][20] The local deposition of materials using a focused electron beam in the presence of a volatile precursor is a wellestablished technique for the maskless fabrication of submicrometer structures such as functionalized tips for scanning probe microscopy, [21][22][23][24][25][26] electrodes for local conductivity measurements, 27 solder bonds for carbon nanotubes studies, 28 nanowires, [29][30][31][32][33] and nanodots. 34 In this letter we demonstrate the possibility to grow highly sensitive cobaltcarbon submicrometer Hall devices by means of a focused electron beam.…”

Spatial resolution and switching field of magnetic force microscope tip coated with FePd-alloy thin film

“…Future HDD media are considered to consist of magnetic materials with very high uniaxial magnetocrystalline anisotropy energies such as FePt and SmCo 5 . Therefore, realization of high H sw is required in addition to highresolution better than 10 nm for MFM observations of such ultra-high-density media.…”