High-resolution microgyroscope using vibratory motion adjustment technology

Kawai, Hiroshi; Atsuchi, K.; Tamura, Masaya; Ohwada, K.

doi:10.1016/s0924-4247(01)00460-5

Cited by 34 publications

(18 citation statements)

References 3 publications

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“…Various tuning or control techniques have been reported to improve the sensitivity of these devices. 3,4 To improve the sensitivity of these micromachined gyroscopes, structural optimization for quality factor increasing and modal frequency matching has been performed. Multiple beam and disc structures with high levels of symmetry are the most promising methods to achieve a high quality factor.…”

Section: Introductionmentioning

confidence: 99%

Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam

et al. 2015

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A new approach to improve the performance of a butterfly gyroscope is developed. The methodology provides a simple way to improve the gyroscope’s sensitivity and stability, by reducing the resonant frequency mismatch between the drive and sense modes. This method was verified by simulations and theoretical analysis. The size of the hexagonal section oblique beam is the major factor that influences the resonant frequency mismatch. A prototype, which has the appropriately sized oblique beam, was fabricated using precise, time-controlled multilayer pre-buried masks. The performance of this prototype was compared with a non-tuned gyroscope. The scale factor of the prototype reaches 30.13 mV/ ˚/s, which is 15 times larger than that obtained from the non-tuned gyroscope. The bias stability of the prototype is 0.8 ˚/h, which is better than the 5.2 ˚/h of the non-tuned devices.

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Section: Introductionmentioning

confidence: 99%

Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam

et al. 2015

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“…University of Michigan demonstrated a vibrating ring gyroscope which could achieve a resolution of 0.01°/s/√Hz in 2001 [5] . In the same year, Yokohama Technical Center developed a high resolution micromachined gyroscope with a resolution of 0.0041°/s/√Hz [6] . In 2008, Georgia Institute of Technology reported a gyroscope named M 2 -TFG with a bias drift as low as 0.15°/h and an angle random walk of 0.003°/√h [7] .The micromachined gyroscopes discussed above are all working in vacuum.…”

Section: Introductionmentioning

confidence: 99%

Performance characterization of a bulk micromachined gyroscope working at atmosphere

Xia

Zheng

et al. 2010

2010 3rd International Symposium on Systems and Control in Aeronautics and Astronautics

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A bulk micromachined gyroscope fabricated with an improved process flow is measured systematically. It achieves good performance at atmosphere. The driving resonant frequency is 1663.5Hz with a quality factor 195, and the sensing resonant frequency is 1677Hz with a quality factor 200. The R 2 -nonlinearity is 0.008% within the range of ±43°/s, which is limited by the digital to analogue converter, with a scale factor of 42.17mV/°/s. The scale factor is reduced to 7.4mV/°/s to perform linear test within a larger range, and the R 2 -nonlinearity is 0.032% within ±200°/s. The bias stability is 19.55°/h and the measured noise floor is 0.0125°/s/√Hz at 1Hz.

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“…The magnitude of oscillation in the sense mode provides a measure of the detected angular velocity. There is a great deal of sophisticated gyroscope design concepts [3,4], and versatile control strategies [5][6][7][8][9] have been reported in order to upgrade detection capability or reduce cost.…”

Section: Introductionmentioning

confidence: 99%

“…These nonlinearities make the resonance frequencies more unpredictable. Unfortunately, most of the reported micro-gyroscopes, however, are controlled by feedback loops which are generally based on linearized dynamic models [6][7][8][9][10]. In practice, the dynamic behaviors of MEMS-based systems usually suffer, to some extent, from nonlinearity effects which are traditionally neglected.…”

Section: Introductionmentioning

confidence: 99%

Stability and resonance of micro-machined gyroscope under nonlinearity effects

Tsai

Sue

2008

Nonlinear Dyn

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Resonance frequency for a micro-gyroscope plays an extremely significant role since the driving frequency is accordingly tuned so that the best sensitivity and resolution can be achieved. In practice, the micro-gyroscope is usually driven into resonance to retain its superior angular rate detection capability. However, the embedded nonlinearity effect upon the micro-gyroscopic dynamics may not only deteriorate the stability around the vicinity of operation point, but also alter the initially-designed resonance frequencies so that the angular rate detection performance of the micro-gyroscope is dramatically degraded. Hence, the nonlinearities, mainly resulting from flexure springs and electrostatic force, are both taken into account to construct the nonlinear dynamic model of the microgyroscope in our work at first. Secondly, the instability region of the proposed micro-gyroscope under different driving frequency and natural frequencies, which tends to be drifted due to mechanical fatigue and temperature rise, is unveiled. In order to catch the insight of slight variation of system parameters, the nonlinear dynamic equation is analyzed by using multiple scales method to outstand the influence of the variation of driving moment. Thirdly, the external resonance and non-resonant hard excitation of the micro-gyroscope-totally five types-are both theoretically studied. It is interesting to find that the resonance frequencies and resonant magnitude are both changed accordingly if either the driving frequency or the magnitude of driving moment is tuned via control loop for the sake of considering more stability or better performance. Finally, the chaotic behavior of the micro-gyroscope is numerically inspected by bifurcation diagrams and verified that the sense mode and drive mode have the similar orbits for transitions across distinct patterns of dynamic motion of the presented micro-gyroscope.

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High-resolution microgyroscope using vibratory motion adjustment technology

Cited by 34 publications

References 3 publications

Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam

Enhanced sensitivity in a butterfly gyroscope with a hexagonal oblique beam

Performance characterization of a bulk micromachined gyroscope working at atmosphere

Stability and resonance of micro-machined gyroscope under nonlinearity effects

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