No abstract

No abstract

A vibrating micro-gyroscope with a thin polysilicon resonator of 400 x 800 p m z was fabricated by silicon surface micromachining. The gyroscope is driven in a lateral direction by electrostatic force, and detects output signals from a capacitance change between the resonator and the substrate. Mechanical Q factors of 2,800 and 16,000 were obtained for the driving mode and the detecting mode of the polysilicon resonator, respectively, at pressures below 0.1 Pa. Methods were presented for modifying the difference between the resonant frequencies of the driving and the detecting modes. The noise equivalent rate of the test device is 7 de&.

Summary electrostatic force, and angular rate is detected as capacitance change between the resonator and its substrate.Mechanical Q factors for the driving and detecting modes of the polysilicon resonator are 2,800 and 16,000, respectively, at pressures below 0.1Pa. The test device worked in a vacuum, and output intensity was decreased at high ambient pressures.A noise-equivalent rate of 2deg/s was obtained at 1Pa.