Vibrating Silicon Microgyroscope

Abstract

Summary electrostatic force, and angular rate is detected as capacitance change between the resonator and its substrate.Mechanical Q factors for the driving and detecting modes of the polysilicon resonator are 2,800 and 16,000, respectively, at pressures below 0.1Pa. The test device worked in a vacuum, and output intensity was decreased at high ambient pressures.A noise-equivalent rate of 2deg/s was obtained at 1Pa.

Micromachined Silicon Gyroscope

“…One [12,13] uses vertical detection and the other [14] uses lateral detection. The structure of the former enables a high accuracy to be achieved, but it requires vacuum packaging to prevent air damping.…”