“…However, for many military and civilian navigation applications, improved accuracy or performance is not necessarily the most important issue, and the most important issue is to meet the performance at a reduced cost and size, especially when incorporating the global positioning system into the inertial navigation system to eliminate inertial sensors' output drifts over time. 4 Considering the above application background, the micromechanical type has a tiny size but limited accuracy that hardly exceeds microgram, 5 while the electrostatic type shows super high resolution but complicated structure and an expensive production cost. 6,7 Comparatively, the traditional pendulous type QFA has extremely simple setup and a competitively low cost; 8 however, its resolution has always been limited to the range of microgram mainly due to the parasitic phenomenon of the differential capacitance that is adopted to measure the displacement of the pendulous reed, which acts as the moving proof-mass of the pendulous accelerometer.…”