The trilayer core-shell polysilsesquioxane/polyacrylate/poly(fluorinated acrylate) (PSQ/PA/PFA) hybrid latex particles are successfully prepared, using functional PSQ latex particles with reactive methacryloxypropyl groups synthesized by the hydrolysis and polycondensation of (3-methacryloxypropyl)trimethoxysilane in the presence of a reactive emulsifier as seeds. Transmission electron microscopy (TEM), scanning electron microscopy (SEM) and dynamic light scattering (DLS) confirm that the resultant hybrid latex particles have evident trilayer core-shell structure and a narrow size distribution. The Fourier transform infrared (FTIR) spectra show that fluorinated acrylate monomers are effectively involved in the emulsion copolymerization and formed the fluorine-containing hybrid latex particles. XPS analysis of the obtained hybrid latex film reveals that the intensity of fluorine signal in the film-air interface is higher than that in the film-glass interface. In addition, compared with pure polyacrylate latex film, the obtained fluorine-containing hybrid film shows higher hydrophobicity and thermal stability, and lower surface free energy.