High sensitive magnetically actuated micromirrors for magnetic field measurement

Cui, Zheng; Wang, Xudi; Li, Yong; Tian, Gui Yun

doi:10.1016/j.sna.2007.04.003

Cited by 20 publications

(6 citation statements)

References 8 publications

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“…The large-scale nonlinear system is solved with a Newton-Raphson method [20]. In particular, P 2 i is itself expressed in the same Fourier basis as in (9) and integrals over the time period of the cubic nonlinear terms and of their linearisation are performed exactly with the trapezoidal rule since the latter method is exponentially convergent for periodic functions.…”

Section: Numerical Solutionmentioning

confidence: 99%

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Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

et al. 2021

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In this work, we address the simulation and testing of MEMS micromirrors with hardening and softening behaviour excited with patches of piezoelectric materials. The forces exerted by the piezoelectric patches are modelled by means of the theory of ferroelectrics developed by Landau–Devonshire and are based on the experimentally measured polarisation hysteresis loops. The large rotations experienced by the mirrors also induce geometrical nonlinearities in the formulation up to cubic order. The solution of the proposed model is performed by discretising the device geometry using the Finite Element Method, and the resulting large system of coupled differential equations is solved by means of the Harmonic Balance Method. Numerical results were validated with experimental data collected on the devices.

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Section: Numerical Solutionmentioning

confidence: 99%

“…Their technology is rapidly progressing, associating to the early stage devices that relied on electrostatic actuation [3][4][5][6][7][8] more recent systems based on magnetic- [9] and piezoactuation [10]. In particular, piezoactuation will play a major role in the next generation of micromirrors and is the object of intensive research.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

et al. 2021

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“…Interested readers are referred to papers by Jander et al [158], and Tian and his research groups [159][160][161]. For information on high spatial resolution, magnetic field induced thermal imaging techniques, interested readers are referred to paper by Cui et al [162].…”

Section: Potential Applicationsmentioning

confidence: 99%

Ferromagnetic Multilayers: Magnetoresistance, Magnetic Anisotropy, and Beyond

2016

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Abstract:Obtaining highly sensitive ferromagnetic, FM, and nonmagnetic, NM, multilayers with a large room-temperature magnetoresistance, MR, and strong magnetic anisotropy, MA, under a small externally applied magnetic field, H, remains a subject of scientific and technical interest. Recent advances in nanofabrication and characterization techniques have further opened up several new ways through which MR, sensitivity to H, and MA of the FM/NM multilayers could be dramatically improved in miniature devices such as smart spin-valves based biosensors, non-volatile magnetic random access memory, and spin transfer torque nano-oscillators. This review presents in detail the fabrication and characterization of a few representative FM/NM multilayered films-including the nature and origin of MR, mechanism associated with spin-dependent conductivity and artificial generation of MA. In particular, a special attention is given to the Pulsed-current deposition technique and on the potential industrial applications and future prospects. FM multilayers presented in this review are already used in real-life applications such as magnetic sensors in automobile and computer industries. These material are extremely important as they have the capability to efficiently replace presently used magnetic sensors in automobile, electronics, biophysics, and medicine, among many others.

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“…Also note that in the case of the offset configuration, the divergent electrostatic torque is less affected by the fringing fields and good agreement between the simplified model and the simulation results is observed (figure 9(b)). Previous works [11][12][13] have justified the approximation of the capacitance and presented a simple method to assess the capacitance by using a correction factor [14].…”

Section: Simulationmentioning

confidence: 99%

“…Tilting elements are typically suspended using compliant torsion axes [11] or bending flexures [12] while an actuating torque is provided by an electromechanical transducer. While a large variety of actuation methods were developed, including magnetic actuation [13,14], thermal actuation [15], actuation based on the use of piezoelectric materials [16] and even acoustic actuation [17], electrostatic actuation remains the most widely used due to its efficiency, low power consumption, simplicity, compatibility with established fabrication processes and common materials used in microfabrication as well as integrated circuit compatibility [18].…”

Section: Introductionmentioning

confidence: 99%

A single-layer tilting actuator with multiple close-gap electrodes

Shmilovich

Krylov

2009

J. Micromech. Microeng.

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We report on the design, fabrication and characterization of a novel tilting electrostatic actuator, fabricated by using a single layer of a silicon on insulator (SOI) wafer and investigate, both theoretically and experimentally, the electromechanical behavior of the device. The actuator incorporates high aspect ratio comb-like electrodes oriented in the direction parallel to the rotation axis of the tilting element. An increase in the tilting angle is accompanied by a decrease in the distance between the electrodes and by an increase of the actuating torque. Simultaneously, the overlap area between electrodes located farther apart the axis shrinks, resulting in a 'restoring' torque in the opposite direction. The electromechanical behavior and stability of the device were investigated using a simplified model of the actuator and verified by a coupled three-dimensional simulation. Model results suggest that by changing the design parameters, the actuator characteristic can be tailored in a large range. Devices of three different configurations incorporating elastic torsion axes or bending flexures were fabricated and characterized and both static and resonant responses, typical for parametrically excited nonlinear oscillators, were registered. Theoretical and experimental results indicate that the suggested architecture can be efficiently used for the static and dynamic operation of electrostatic tilting devices.

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High sensitive magnetically actuated micromirrors for magnetic field measurement

Cited by 20 publications

References 8 publications

Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

Analysis of the Nonlinear Response of Piezo-Micromirrors with the Harmonic Balance Method

Ferromagnetic Multilayers: Magnetoresistance, Magnetic Anisotropy, and Beyond

A single-layer tilting actuator with multiple close-gap electrodes

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