High sensitivity piezoelectric accelerometer

Tims, A. C.; Davidson, R. J. L.; Timme, R. W.

doi:10.1063/1.1134256

Cited by 9 publications

(4 citation statements)

References 2 publications

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“…However, practically, the small area of PMN-28PT single crystal was not strongly affixed to the relatively large volume (1000 mm 3 ) and heavy (17.8 g) seismic mass (i.e., the area ratio between the piezoelectric single crystal and the mass was 1:16). The typical compression acceleration sensor manufacturing method, in which a tie bolt is used to bond the mass and piezoelectric elements together through a center hole, is not suitable for use with small piezoelectric component [20,21]. This problem was overcome by using an elastic body support layer with a very low elastic modulus around the piezoelectric component.…”

Section: Sensor Fabrication and Experiments Resultsmentioning

confidence: 99%

“…On the other hand, there has been limited investigation of vector sensors, especially utilizing the compressive-type accelerometer. Compressive-mode vector sensors are simple in design, and can be easily used in various applications for mechanical and structural monitoring [20,21]. If the vector sensors developed here are aligned with the X, Y, and Z axes inside an omnidirectional hydrophone, they could be used to measure the directivity of an acoustic source for underwater sensor nodes.…”

Section: Introductionmentioning

confidence: 99%

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The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal

Yeo

Choi

Jin

et al. 2019

Sensors

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Underwater sensors that detect the distance and direction of acoustic sources are critical for surveillance monitoring and target detection in the water. Here, we propose an axial vector sensor that utilizes a small (~1 cm3) compressive-type piezoelectric accelerometer using piezoelectric single crystals. Initially, finite element analysis (FEA) was used to optimize the structure that comprised piezoelectric Pb(Mb1/3Nb2/3)O3-28%PbTiO3 single crystals on a tungsten seismic mass. The receiving voltage sensitivity (RVS) was enhanced through geometric optimization of the thickness and sensing area of the piezoelectric material and the seismic mass. The estimated maximum RVS of the optimized vector sensor was −212 dB. FEA simulations and practical measurements were used to verify the directivity of the vector sensor design, which exhibited a dipole pattern. The dipole beam pattern was used to obtain cardioid patterns using the simulated and measured results for comparison. The results clearly showed the feasibility of using the proposed piezoelectric single-crystal accelerometer for a compressive-type vector sensor.

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Section: Sensor Fabrication and Experiments Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal

Yeo

Choi

Jin

et al. 2019

Sensors

View full text Add to dashboard Cite

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“…The current accelerometers can be classified two types by their adopted sensors. The first type is the accelerometers based on electrical sensors, such as strain gauge [3], [4], piezoelectric sensor [5]- [8] and capacitive sensor [9]- [11]. Strain gauge accelerometers usually have high stability, low cost and a bandwidth of 100 Hz.…”

Section: Introductionmentioning

confidence: 99%

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

Chang

Lei

et al. 2019

IEEE Photonics J.

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A new micro accelerometer is proposed to measure and reduce low-frequency vibrations actively. It is mainly composed of a seismic mass, a leaf spring, and a focus probe modified from a digital versatile disc (DVD) pickup head. When a vibration occurs, the leaf spring will exhibit an elastic deformation; the seismic mass will move up and down due to the effect of inertia, whose displacement can be detected by the focus probe. Therefore, the measured acceleration can be obtained. The accelerometer was designed, and its proper parameters were obtained. The accelerometer was calibrated and tested using a high-precision vibration generator. The experimental results demonstrate that the proposed accelerometer has a sensitivity of 10.8 V/g, a resolution of 3.0 × 10 -4 g, and a working frequency range of 1-10 Hz. Also, the uncertainty of the accelerometer was analyzed in detail and an evaluation result of 7.0 × 10 -4 g (K = 2) was obtained. It can be used to detect the low-frequency microvibrations in high-precision measurement and machining fields.

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“…The sensitivity of the accelerometer is 9 mV/g, the linearity is 0.0205, and the hysteresis error is 0.0033. Zou et al [ 4 ], Nishshanka et al [ 5 ], and Tims et al [ 6 ] have also made progress in this field and the detailed data is shown in Table 1 . From Table 1 , we can see that the PZT accelerometers have a wide bandwidth.…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

Lei

Chang

et al. 2018

Sensors

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Low-frequency vibration is a harmful factor that affects the accuracy of micro/nano-measuring machines. Low-frequency vibration cannot be completely eliminated by passive control methods, such as the use of air-floating platforms. Therefore, low-frequency vibrations must be measured before being actively suppressed. In this study, the design of a low-cost high-sensitivity optical accelerometer is proposed. This optical accelerometer mainly comprises three components: a seismic mass, a leaf spring, and a sensing component based on a four-quadrant photodetector (QPD). When a vibration is detected, the seismic mass moves up and down due to the effect of inertia, and the leaf spring exhibits a corresponding elastic deformation, which is amplified by using an optical lever and measured by the QPD. Then, the acceleration can be calculated. The resonant frequencies and elastic coefficients of various seismic structures are simulated to attain the optimal detection of low-frequency, low-amplitude vibration. The accelerometer is calibrated using a homemade vibration calibration system, and the calibration experimental results demonstrate that the sensitivity of the optical accelerometer is 1.74 V (m·s−2)−1, the measurement range of the accelerometer is 0.003–7.29 m·s−2, and the operating frequencies range of 0.4–12 Hz. The standard deviation from ten measurements is under 7.9 × 10−4 m·s−2. The efficacy of the optical accelerometer in measuring low-frequency, low-amplitude dynamic responses is verified.

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High sensitivity piezoelectric accelerometer

Cited by 9 publications

References 2 publications

The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal

The Design and Optimization of a Compressive-Type Vector Sensor Utilizing a PMN-28PT Piezoelectric Single-Crystal

A Low-Frequency Micro Accelerometer Based on Three-Lobed Leaf Spring and a Focus Probe

Development of a High-Sensitivity Optical Accelerometer for Low-Frequency Vibration Measurement

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