High sensitivity visible light refractive index sensor based on high order mode Si_3N_4 photonic crystal nanobeam cavity

Liu, Weixi; Yan, Jialin; Shi, Yaocheng

doi:10.1364/oe.25.031739

Cited by 22 publications

(10 citation statements)

References 17 publications

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“…The 900 nm/RIU measurement record of S fully confirms that the electric field can be strongly localized in the slot region. In 2017, Liu et al proposed a suspended ultra-sensitive silicon nitride (Si 3 N 4 ) PCNC sensor [59]. Si 3 N 4 has been considered as an alternative material for SOI platforms because of low-cost, CMOS compatible properties and relatively low RI (n~2).…”

Section: Efforts On Ultra-high Figure Of Merit (Fom) For Refractive Imentioning

confidence: 99%

Photonic Crystal Nanobeam Cavities for Nanoscale Optical Sensing: A Review

et al. 2020

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The ability to detect nanoscale objects is particular crucial for a wide range of applications, such as environmental protection, early-stage disease diagnosis and drug discovery. Photonic crystal nanobeam cavity (PCNC) sensors have attracted great attention due to high-quality factors and small-mode volumes (Q/V) and good on-chip integrability with optical waveguides/circuits. In this review, we focus on nanoscale optical sensing based on PCNC sensors, including ultrahigh figure of merit (FOM) sensing, single nanoparticle trapping, label-free molecule detection and an integrated sensor array for multiplexed sensing. We believe that the PCNC sensors featuring ultracompact footprint, high monolithic integration capability, fast response and ultrahigh sensitivity sensing ability, etc., will provide a promising platform for further developing lab-on-a-chip devices for biosensing and other functionalities.Micromachines 2020, 11, 72 2 of 20 microcavities confine the light in a small volume, leading to significant enhancement of light-matter interaction, resulting in ultra-high sensitivity (S) and a low detection limit. When subject to slight environmental changes, the spectral properties change can be obtained, e.g., resonator wavelength shift [20][21][22] and mode broadening [23].The main types of optical microcavities include whispering gallery mode (WGM) cavities, Fabry-Perot (F-P) cavities and photonic crystal (PhC) cavities [24]. Among these, PhC cavities have been investigated as advantageous platforms due to their ultra-high Q/V enabling the enhancement of lightmatter interactions. Particularly, compared with two-dimensional (2D) PhC cavities, one-dimensional photonic crystal nanobeam cavities (1D-PCNCs) attract great attention for their ultra-sensitive optical sensing and lab-on-a-chip applications, owing to their ultra-compact size, ultra-small mode volume, high integrability with bus-waveguide and excellent complementary metal-oxide-semiconductor (CMOS) compatible properties [25][26][27][28][29][30][31][32][33].In this review, we will focus on nanoscale optical sensing based on 1D-PCNCs. The structure of the review is organized as follows. A comprehensive overview about basic properties and sensing mechanisms of 1D-PCNCs sensors is discussed in Section 2. In Section 3, firstly, we introduce the efforts to pursue ultra-high figure of merit (FOM) in refractive index (RI) sensing based on 1D-PCNCs. Secondly, we outline the applications of 1D-PCNC sensors on single nanoparticle and label-free molecule (viruses, proteins and DNAs) detection. Thirdly, a monolithic integrated 1D-PCNC sensor array for multiplexed sensing is introduced explicitly. In addition, we present other sensing applications of 1D-PCNC sensors such as temperature sensing and optomechanical sensing, etc. Next, we review the nanofabrication and coupling techniques in the development of 1D-PCNC sensors in Section 4. Finally, we draw a brief conclusion. Figure 2. (a) Schematic of photonic circuits. The green lines, red boxes and black boxes represe...

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Section: Efforts On Ultra-high Figure Of Merit (Fom) For Refractive Imentioning

confidence: 99%

Photonic Crystal Nanobeam Cavities for Nanoscale Optical Sensing: A Review

et al. 2020

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“…Step 1: Impose strict temperature regulation and narrow-band laser emission (or spectral filtering), so as to reduce ∆T and ∆λ; for any given sample, these are the only free variables affecting the detection limit, which can be calculated by use of Equation (19).…”

Section: Optimization Protocolmentioning

confidence: 99%

“…Refractive index sensors are intensely investigated for numerous biomedical [1][2][3], chemical [4,5] and industrial [6,7] applications. An indicative yet far from exhaustive list of sensing mechanisms relies on plasmonic [8][9][10][11], photonic crystal [12][13][14][15], micro-cavity [16][17][18][19], optical fiber [20][21][22][23] and wave-guide [24][25][26][27] configurations. Associated with Fresnel reflectance properties at planar interfaces, differential refractometry offers an alternative path to sensing refractive index changes, by exploitation of interference [28], deflection [29] or (more relevant to the present work) critical-angle [30][31][32][33][34][35] effects.…”

Section: Introductionmentioning

confidence: 99%

Critical-Angle Differential Refractometry of Lossy Media: A Theoretical Study and Practical Design Issues

et al. 2019

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At a critical angle of incidence, Fresnel reflectance at an interface between a fronttransparent and a rear lossy medium exhibits sensitive dependencies on the complex refractiveindex of the latter. This effect facilitates the design of optical sensors exploiting single (or multiple)reflections inside a prism (or a parallel plate). We determine an empirical framework that capturesperformance specifications of this sensing scheme, including sensitivity, detection limit, range oflinearity and—what we define here as—angular acceptance bandwidth. Subsequently, we developan optimization protocol that accounts for all relevant optical or geometrical variables and that canbe utilized in any application.

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“…Furthermore, research has been carried out to enhance the single nanobeam cavity design in order to achieve the ultra-small mode volume suitable for nanoscale RI sensing [ 81 , 82 , 83 , 84 ]. Along with much work on telecom wavelength range, Liu et al [ 85 ] experimentally demonstrated a Si 3 N 4 PhC nanobeam cavity for highly sensitive RI sensing at visible spectrum resonance wavelength. Visible light sensors have the unique advantage of avoiding high light absorption of water in the telecom near-infrared region.…”

Section: Refractive Index Sensingmentioning

confidence: 99%

Applications of Photonic Crystal Nanobeam Cavities for Sensing

et al. 2018

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In recent years, there has been growing interest in optical sensors based on microcavities due to their advantages of size reduction and enhanced sensing capability. In this paper, we aim to give a comprehensive review of the field of photonic crystal nanobeam cavity-based sensors. The sensing principles and development of applications, such as refractive index sensing, nanoparticle sensing, optomechanical sensing, and temperature sensing, are summarized and highlighted. From the studies reported, it is demonstrated that photonic crystal nanobeam cavities, which provide excellent light confinement capability, ultra-small size, flexible on-chip design, and easy integration, offer promising platforms for a range of sensing applications.

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High sensitivity visible light refractive index sensor based on high order mode Si_3N_4 photonic crystal nanobeam cavity

Cited by 22 publications

References 17 publications

Photonic Crystal Nanobeam Cavities for Nanoscale Optical Sensing: A Review

Photonic Crystal Nanobeam Cavities for Nanoscale Optical Sensing: A Review

Critical-Angle Differential Refractometry of Lossy Media: A Theoretical Study and Practical Design Issues

Applications of Photonic Crystal Nanobeam Cavities for Sensing

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