High-Speed AMHS and Its Operation Method for 300-mm QTAT Fab

Abstract

By using all-single-wafer processing in the 300-mm quick turn-around time production system, we have shortened cycle time to one-half or less than that of mixed-batch processing. We have also developed a high-speed automated material handling systems (AMHS) for achieving short cycle time. An intrabay rail-guided vehicle developed for the 300-mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. We achieved a transfer time of one third or less that of previous fabs.

A GA-based method to reduce material handling: the case of TFT-LCD array Fabs in Taiwan

“…One previous research in 1994, by Lee et al proposed a system modeled by Petri Nets to integrate AGV models for material handling and models for part processing into a single coherent model to reduce labor cost in a flexible manufacturing system (FMS) (Lee et al 1994). In 2004, Wakabayashi et al developed a high speed automated material handling system to shorten cycle time by one half or less with new concepts, hardware improvements, and new operation methods in a wafer process for the 300-mm fab (Wakabayashi et al 2004). Later, Wu et al (2007) showed that a robot or an AGV can be both a material handling device and a buffer.…”

Improving Priority Lot Cycle Times

“…For normal lot cycle time, − smaller lot sizes and − single wafer processing tools only have been identified by a number of IC manufacturers as key architectural elements to improve normal lot cycle time (see [1], [7] or [9]). But how promising are these changes for priority lots?…”

Simulation of a full 300mm semiconductor manufacturing plant with material handling constraints

“…The reality is that the market requires both higher performance devices using the latest process technology and shorter delivery time using the latest production technology Wakabayashi et al (2004). Most of the time, simulation of a real model, especially semiconductor manufacturing plant, is considered time consuming to construct due to a complex system configuration and requires long execution times to statistically produce valid estimate results Nazzal and McGinnis (2007).…”