2009
DOI: 10.1063/1.3279129
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High-speed Ge photodetector monolithically integrated with large cross-section silicon-on-insulator waveguide

Abstract: We demonstrate a compact, high speed Ge photodetector efficiently butt-coupled with a large cross-section silicon-on-insulate (SOI) waveguide in which the Ge p-i-n junction is placed in the horizontal direction to enable very high speed operation. The demonstrated photodetector has an active area of only 0.8×10 μm2, greater than 32 GHz optical bandwidth, and a responsivity of 1.1 A/W at a wavelength of 1550 nm. Very importantly the device can readily be integrated with high performance wavelength-division-mult… Show more

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Cited by 185 publications
(80 citation statements)
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“…Although silicon is not suited as a light emitter or detector in the infrared, several approaches have been demonstrated to integrate lasers and detectors on a silicon platform [2][3][4][5] modulators and detectors, is an important requirement. This can be achieved by using e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Although silicon is not suited as a light emitter or detector in the infrared, several approaches have been demonstrated to integrate lasers and detectors on a silicon platform [2][3][4][5] modulators and detectors, is an important requirement. This can be achieved by using e.g.…”
Section: Introductionmentioning
confidence: 99%
“…Although group-IV-based optical building blocks including silicon modulators, 2 microring resonators, 3 waveguides, 4 and germanium photodetectors 5 have demonstrated their techno-economic viability, an efficient Si-based laser source remains the most challenging component due to the indirect bandgap of Si. 6 Integrating high performance III-V lasers with Si has been considered a promising path to resolve this challenge.…”
mentioning
confidence: 99%
“…Longer absorption lengths and much smaller devices could be realized by waveguide integration, leading to higher quantum effi ciency, higher bandwidth and lower dark current. Th e most recently reported device, a silicon waveguide with integrated germanium p-i-n detector, has a sensitivity of 1.1 A W -1 and a 3 dB bandwidth of over 32 GHz [42]. Th e device structure is shown in Figure 4.…”
Section: Integrated Silicon Photodetectorsmentioning
confidence: 99%