High-speed microfabricated silicon turbomachinery and fluid film bearings

Fréchette, Luc; Jacobson, S. A.; Breuer, Kenneth S.; Ehrich, F. F.; Ghodssi, Reza; Khanna, R.; Wong, Chee Wei; Zhang, Xin; Schmidt, Martin; Epstein, A. H.

doi:10.1109/jmems.2004.839008

Cited by 129 publications

(63 citation statements)

References 17 publications

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“…The devices suffer from low yield and short lifetime 15 . Only several rotary MEMS were made on each wafer and most of them just operated from a few seconds to a few hours 10,16 . Therefore, it is extremely difficult to apply techniques learned in MEMS to the fabrication of even smaller NEMS devices.…”

mentioning

confidence: 99%

“…Therefore, it is extremely difficult to apply techniques learned in MEMS to the fabrication of even smaller NEMS devices. This is also evidenced by the restricted sizes of MEMS motors of millimetres to hundreds of micrometres [16][17][18] . Few can reach tens of micrometres and very few can make truly nanoscale motors even using the best available techniques 12,13,19 .…”

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confidence: 99%

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Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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The development of rotary nanomotors is crucial for advancing nanoelectromechanical system technology. In this work, we report design, assembly and rotation of ordered arrays of nanomotors. The nanomotors are bottom-up assembled from nanoscale building blocks with nanowires as rotors, patterned nanomagnets as bearings and quadrupole microelectrodes as stators. Arrays of nanomotors rotate with controlled angle, speed (over 18,000 r.p.m.), and chirality by electric fields. Using analytical modelling, we reveal the fundamental nanoscale electrical, mechanical and magnetic interactions in the nanomotor system, which excellently agrees with experimental results and provides critical understanding for designing metallic nanoelectromechanical systems. The nanomotors can be continuously rotated for 15 h over 240,000 cycles. They are applied for controlled biochemical release and demonstrate releasing rate of biochemicals on nanoparticles that can be precisely tuned by mechanical rotations. The innovations reported in this research, from concept, design and actuation to application, are relevant to nanoelectromechanical system, nanomedicine, microfluidics and lab-on-a-chip architectures.

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confidence: 99%

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confidence: 99%

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

et al. 2014

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“…A micromachined air turbine supported with air bearings was designed at MIT and operated at 1.3 million rpm with tangential speed of 300 m/s [152].…”

Section: Air (Fluid) Bearingsmentioning

confidence: 99%

Limits, Modeling and Design of High-Speed Permanent Magnet Machines

Borisavljevic¹

2013

Springer Theses

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“…high temperature, high stress level, and/or high strain rates etc. Examples include pressure sensors for aerospace applications, micro heat engines and related components, etc (Epstein and Senturia1997;Frechette et al 2000Frechette et al , 2005Spadaccini et al 2002Spadaccini et al , 2003Wong et al 2004;Jan Peirs et al 2004;Miki et al 2003).…”

Section: Thin Film Materials: a Mechanical Perspectivementioning

confidence: 99%

Residual Stress and Fracture of PECVD Thick Oxide Films for Power MEMS Structures and Devices

Zhang¹

2007

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Public reporting burden for this collection of information is estimated to average 1 hour per response, including the time for reviewing instructions, seerching data sources, gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comments regarding this burden estimate or any other aspect of this collection of information, including suggestions for reducing this burden to Washington Headquarters Service, Directorate for Information Operations and Reports, 1215 Jefferson Davis Highway, Suite 1204, Arlington, VA 22202-4302, and SUPPLEMENTARY NOTES14. ABSTRACT Plasma enhanced chemical vapor deposited (PECVD) silicon oxide (SiOx) is the most commonly used interlayer dielectric (ILD) in MEMS devices and structures. In this project, PECVD SiOx is chosen as an example for the systematic study of mechanical behavior and underlying casual mechanisms of amorphous thin films for MEMS applications, which are generally less well understood because of the complex interplay among the deformation mechanisms. In this project, PECVD SiO, is chosen as an example for the systematic study of mechanical behavior and underlying causal mechanisms of amorphous thin films for MEMS applications, which are generally less well understood because of the complex interplay among the deformation mechanisms. SUBJECT TERMSMechanical behaviors of the PECVD SiOx thin films are probed at 1) different size scales (from wafer level down to micro/nano-scale, and different lengthscale within each realm); 2) different temperatures (from room temperature up to 1100 0C); and 3) with a combination of different experimental techniques (such as substrate curvature measurements, nanoindentation tests, and a novel "microbridge testing" technique, etc.). A broad range of mechanical analysis is covered, including film stress and related material properties changes, elastic properties, plastic properties (both time-independent and time-dependent), deformation mechanisms (both at room temperature and elevated temperatures).Wherever applicable, materials analysis techniques such as SEM, AFM, FTIR, XRD, and SIMS were employed to strengthen the discussions on the structureproperties relationship and the causal mechanisms of the mechanical responses of the PECVD SiOx. These experiments reveal various interesting arid disiirictive characteristics of the mechanical responses of the PECVD SiOx thin films, and the microstructural causal mechanisms for each of them are analyzed in depth.The outcome of this work will provide a comprehensive characterization of the mechanical responses of the PECVD SiOx thin films under different thermal conditions, stress levels, size scales, and in both elastic and plastic regions. In addition, both new experimental methodologies and theoretical models for data 3 analysis are resulted, which can be readily applied to a wide variety of thin film materials for various different applications. Last but not least, the physical causal mechanisms for the experimental results are elucidated, ...

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High-speed microfabricated silicon turbomachinery and fluid film bearings

Cited by 129 publications

References 17 publications

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Ultrahigh-speed rotating nanoelectromechanical system devices assembled from nanoscale building blocks

Limits, Modeling and Design of High-Speed Permanent Magnet Machines

Residual Stress and Fracture of PECVD Thick Oxide Films for Power MEMS Structures and Devices

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