An analytic and experimental investigation into gaseous flow with slight rarefaction through long microchannels is undertaken. A two-dimensional (2-D) analysis of the Navier-Stokes equations with a first-order slip-velocity boundary condition demonstrates that both compressibility and rarefied effects are present in long microchannels. By undertaking a perturbation expansion in , the height-to-length ratio of the channel, and using the ideal gas equation of state, it is shown that the zeroth-order analytic solution for the streamwise mass flow corresponds well with the experimental results. Also, the effect of slip upon the pressure distribution is derived, and it is obtained that this slip velocity leads directly to a wall-normal migration of mass. The fabrication of wafer-bonded microchannels that possess well-controlled surface structure is described, and a means for accurately measuring the mass flow through the channels is presented. Experimental results obtained with this mass-flow measurement technique for streamwise helium mass flow through microchannels 52.25-m wide, 1.33-m deep, and 7500-m long for a pressure range of 1.6-4.2 atmospheres (outlet pressures at atmospheric) are presented and shown to compare favorably with the analysis. [147] Index Terms-Fluid flow measurement, microelectromechanical devices, perturbation methods, rarefied gas dynamics.

The slip effects of water flow in hydrophilic and hydrophobic microchannels of 1 and 2 μm depth are examined experimentally. High-precision microchannels were treated chemically to enhance their hydrophilic and hydrophobic properties. The flow rates of pure water at various applied pressure differences for each surface condition were measured using a high-precision flow metering system and compared to a theoretical model that allows for a slip velocity at the solid surface. The slip length was found to vary approximately linearly with the shear rate with values of approximately 30 nm for the flow of water over hydrophobic surfaces at a shear rate of 105 s−1. The existence of slip over the hydrophilic surface remains uncertain, due to the sensitivity of the current analysis to nanometer uncertainties in the channel height.

We activated a solid-fluid interface by attaching flagellated bacteria to a solid surface. We adsorbed swarmer cells of Serratia marcescens to polydimethylsiloxane or polystyrene. The cell bodies formed a densely packed monolayer while their flagella continued to rotate freely. Motion of the fluid close to an extended flat surface, visualized with tracer beads, was dramatically enhanced compared to the motion farther away. The tracer beads revealed complex ever-changing flow patterns, some linear (rivers), others rotational (whirlpools). Typical features of this flow were small (tens of micro m) and reasonably stable (many minutes). The surface performed active mixing equivalent to diffusion with a coefficient of 2 x 10(-7) cm(2)/s. We call these flat constructs "bacterial carpets". When attached to polystyrene beads or to fragments of polydimethylsiloxane, the bacteria generated both translation and rotation. We call these constructs "auto-mobile beads" or "auto-mobile chips". Given the size and strength of the flow patterns near the carpets, the motion must be generated by small numbers of coordinated flagella. We should be able to produce larger and longer-range effects by increasing coordination.

High-precision experimental results are reported showing the tangential momentum accommodation coefficient (TMAC) for several gases in contact with single-crystal silicon to be less than unity. A precise and robust experimental platform is demonstrated for measurement of mass flows through silicon micromachined channels due to an imposed pressure gradient. Analytic expressions for isothermal Maxwellian slip flows through long channels are used to determine the TMAC at a variety of Knudsen numbers. Results from experiments using nitrogen, argon and carbon dioxide are presented. For all three gases the TMAC is found to be lower than one, ranging from 0.75 to 0.85.