Mass flow and tangential momentum accommodation in silicon micromachined channels

Arkilic, Errol; Breuer, Kenneth S.; Schmidt, Martin

doi:10.1017/s0022112001004128

Cited by 303 publications

(272 citation statements)

References 8 publications

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“…Finally, we note that the particle transition radius is affected by the Knudsen number Kn, especially in the large Kn limit where the interactions of the fluid molecules impact the collision dynamics [24]. Amorphous, rough surfaces and the odd particle shape should also impact the transition radius, and these influences arise from geometric as well as potential energy variations.…”

Section: Prl 95 014502 (2005) P H Y S I C a L R E V I E W L E T T E R Smentioning

confidence: 89%

Gas-Nanoparticle Scattering: A Molecular View of Momentum Accommodation Function

Wang

2005

Phys. Rev. Lett.

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We examine the origin of diffuse gas-particle scattering by molecular dynamics simulation and show that diffuse scattering is the consequence of gas molecule trapping on the particle surface. Trapping occurs because of gas-particle interactions and the particle's ability of energy accommodation. These observations explain the transition from specular-to-diffuse scattering as the particle size becomes larger than the molecular size. We discuss the implication of this transition on the transport properties of nanometer-size particles.

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Section: Prl 95 014502 (2005) P H Y S I C a L R E V I E W L E T T E R Smentioning

confidence: 89%

Gas-Nanoparticle Scattering: A Molecular View of Momentum Accommodation Function

Wang

2005

Phys. Rev. Lett.

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“…The streaming velocity profile at the inlet is generally not known, so we must rely on boundary values of temperature, density and pressure to derive the corresponding local velocity required for Eq. (2). The boundary conditions used in the present work are those proposed by Wang and Li [21].…”

Section: Pressure Boundary Conditionsmentioning

confidence: 99%

“…For example, non-linear pressure gradients have been observed in micro-channel flows [2], along with relatively large velocity slip and temperature jump values. The movement of radiometer vanes when exposed to sunlight is caused by rarefied gas flow effects, i.e.…”

Section: Introductionmentioning

confidence: 99%

A DSMC investigation of gas flows in micro-channels with bends

et al. 2013

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This version is available at https://strathprints.strath.ac.uk/42237/ Strathprints is designed to allow users to access the research output of the University of Strathclyde. Unless otherwise explicitly stated on the manuscript, Copyright © and Moral Rights for the papers on this site are retained by the individual authors and/or other copyright owners. Please check the manuscript for details of any other licences that may have been applied. You may not engage in further distribution of the material for any profitmaking activities or any commercial gain. You may freely distribute both the url (https://strathprints.strath.ac.uk/) and the content of this paper for research or private study, educational, or not-for-profit purposes without prior permission or charge.Any correspondence concerning this service should be sent to the Strathprints administrator: strathprints@strath.ac.ukThe Strathprints institutional repository (https://strathprints.strath.ac.uk) is a digital archive of University of Strathclyde research outputs. It has been developed to disseminate open access research outputs, expose data about those outputs, and enable the management and persistent access to Strathclyde's intellectual output.A DSMC investigation of gas flows in micro-channels with bends Monte Carlo (DSMC) solver, and benchmarked against simple micro-channel flow cases found in the literature. DSMC simulations are then carried out of gas flows for varying degrees of rarefaction along micro-channels with both one and two 90-degree bends. The results are compared to those from the equivalent straight micro-channel geometry. Away from the immediate bend regions, the pressure and Mach number profiles do not differ greatly from those in straight channels, indicating that there are no significant losses introduced when a bend is added to a micro-channel geometry. It is found that the inclusion of a bend in a micro-channel can increase the amount of mass that a channel can carry, and that adding a second bend produces a greater mass flux enhancement. This increase happens within a small range of Knudsen number (0.02 6 Kn in 6 0.08). Velocity slip and shear stress profiles at the channel walls are presented for the Knudsen showing the largest mass flux enhancement.

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“…These parameters are therefore expected to be the primary determinants of interfacial thermal resistance at a gas-solid boundary. There has been significant effort dedicated to quantifying the accommodation of gas molecules on a solid surface both experimentally 11,55,67 and from MD simulations. 56,57 While each transport property has its own accommodation to a surface, the Maxwell model for gas-surface interaction has been widely used to describe transport phenomena that do not include high speed nonisothermal conditions.…”

Section: Effect Of ␣ P and ␣ G : Phonon Absorptivity And Accommodamentioning

confidence: 99%

“…[1][2][3][4][5][6][7][8] Subcontinuum transport in gases has been studied comprehensively, particularly for high-altitude aerothermodynamics. 9 With the advent of microelectromechanical systems ͑MEMS͒, the area of rarefied gas dynamics has attracted new attention in microchannel flow and heat transfer, [10][11][12][13] squeeze film damping, 14,15 heat transfer from microcantilevers to substrates, [16][17][18] and in microthrusters, 19 among other areas.…”

Section: Introductionmentioning

confidence: 99%

Modeling of subcontinuum thermal transport across semiconductor-gas interfaces

Singh

Guo²,

Alexeenko³

et al. 2009

Journal of Applied Physics

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A physically rigorous computational algorithm is developed and applied to calculate subcontinuum thermal transport in structures containing semiconductor-gas interfaces. The solution is based on a finite volume discretization of the Boltzmann equation for gas molecules ͑in the gas phase͒ and phonons ͑in the semiconductor͒. A partial equilibrium is assumed between gas molecules and phonons at the interface of the two media, and the degree of this equilibrium is determined by the accommodation coefficients of gas molecules and phonons on either side of the interface. Energy balance is imposed to obtain a value of the interface temperature. The classic problem of temperature drop across a solid-gas interface is investigated with a simultaneous treatment of solid and gas phase properties for the first time. A range of transport regimes is studied, varying from ballistic phonon transport and free molecular flow to continuum heat transfer in both gas and solid. A reduced-order model is developed that captures the thermal resistance of the gas-solid interface. The formulation is then applied to the problem of combined gas-solid heat transfer in a two-dimensional nanoporous bed and the overall thermal resistance of the bed is characterized in terms of the governing parameters. These two examples exemplify the broad utility of the model in practical nanoscale heat transfer applications.

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Mass flow and tangential momentum accommodation in silicon micromachined channels

Cited by 303 publications

References 8 publications

Gas-Nanoparticle Scattering: A Molecular View of Momentum Accommodation Function

Gas-Nanoparticle Scattering: A Molecular View of Momentum Accommodation Function

A DSMC investigation of gas flows in micro-channels with bends

Modeling of subcontinuum thermal transport across semiconductor-gas interfaces

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