High-Speed Temperature Control Method for MEMS Thermal Gravimetric Analyzer Based on Dual Fuzzy PID Control

Abstract

The traditional thermal gravimetric analyzer (TGA) has a noticeable thermal lag effect, which restricts the heating rate, while the micro-electro-mechanical system thermal gravimetric analyzer (MEMS TGA) utilizes a resonant cantilever beam structure with high mass sensitivity, on-chip heating, and a small heating area, resulting in no thermal lag effect and a fast heating rate. To achieve high-speed temperature control for MEMS TGA, this study proposes a dual fuzzy proportional-integral-derivative (PID) control method. The fuzzy control adjusts the PID parameters in real-time to minimize overshoot while effectively addressing system nonlinearities. Simulation and actual testing results indicate that this temperature control method has a faster response speed and less overshoot compared to traditional PID control, significantly improving the heating performance of MEMS TGA.

MEMS Resonant Beam with Outstanding Uniformity of Sensitivity and Temperature Distribution for Accurate Gas Sensing and On-Chip TGA

“…Secondly, the temperature distribution in the sample area of the microcantilever is also not uniform. Because the heat sink of the microcantilever is at the fixed end of the microcantilever, the temperature gradually decreases from the free end to the fixed end along the microcantilever [ 16 ]. The non-uniform temperature distribution of the microcantilever will affect the temperature accuracy of TGA testing.…”