High-sweep-rate 1310 nm MEMS-VCSEL with 150 nm continuous tuning range

Jayaraman, Vijaysekhar; Cole, Garrett D.; Robertson, M.; Uddin, A.; Cable, Alex

doi:10.1049/el.2012.1552

Cited by 78 publications

(40 citation statements)

References 8 publications

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“…The ability of the VCSEL to operate at ~MHZ repetition rates (900kHz corresponding to 1.8MHz axial scan rate with bi-directional scanning), is in contrast to other swept sources using longer external cavity designs 2 . 16 , with voltages on the order of 60V for full tuning. Since that time, emphasis on these devices has been on demonstrating reliability and manufacturability, leading to the commercialization of 1310nm devices in 2013.…”

Section: Optically Pumped 1300nm and 1060nm Vcsel Device Performancementioning

confidence: 99%

“…In 2011, we reported the first widely tunable optically pumped 1300nm MEMS-VCSELs, exhibiting 110nm tuning range, and demonstrated SS-OCT imaging with these devices up to an axial scan rate of 760kHz 14 . Since that time, optically pumped 1060nm devices have also been developed 15 , the tuning range at both 1060 and 1300nm 16 has increased, and a large number of imaging results have been demonstrated at both wavelengths. In recent months, we have also demonstrated the widest tuning range to date in electrically pumped 1060nm MEMS-VCSELs.…”

Section: Introductionmentioning

confidence: 99%

“…Figure 2 illustrates the VCSEL device structure used at both 1060nm and 1300nm, while figures 3 and 4 summarize the best device results obtained at these two wavelengths. 16 and 1060nm (B) 15 . Both devices employ a fully oxidized GaAs/AlxOy bottom mirror, multi-quantum well gain region and suspended top mirror.…”

Section: Introductionmentioning

confidence: 99%

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Recent advances in MEMS-VCSELs for high performance structural and functional SS-OCT imaging

et al. 2014

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Since the first demonstration of swept source optical coherence tomography (SS-OCT) imaging using widely tunable micro-electromechanical systems vertical cavity surface-emitting lasers (MEMS-VCSELs) in 2011, VCSEL-based SS-OCT has advanced in both device and system performance. These advances include extension of MEMS-VCSEL center wavelength to both 1060nm and 1300nm, improved tuning range and tuning speed, new SS-OCT imaging modes, and demonstration of the first electrically pumped devices. Optically pumped devices have demonstrated continuous singlemode tuning range of 150nm at 1300nm and 122nm at 1060nm, representing a fractional tuning range of 11.5%, which is nearly a factor of 3 greater than the best reported MEMS-VCSEL tuning ranges prior to 2011. These tuning ranges have also been achieved with wavelength modulation rates of >500kHz, enabling >1 MHz axial scan rates. In addition, recent electrically pumped devices have exhibited 48.5nm continuous tuning range around 1060nm with 890kHz axial scan rate, representing a factor of two increase in tuning over previously reported electrically pumped MEMS-VCSELs in this wavelength range. New imaging modes enabled by optically pumped devices at 1060nm and 1300nm include full eye length imaging, pulsatile Doppler blood flow imaging, high-speed endoscopic imaging, and hand-held wide-field retinal imaging.

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Section: Optically Pumped 1300nm and 1060nm Vcsel Device Performancementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Recent advances in MEMS-VCSELs for high performance structural and functional SS-OCT imaging

et al. 2014

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“…Since the cavity length of VCSELs is very short, their tunable micro-cavity brings broad and continuous wavelength tuning. A micro-electro-mechanical-system VCSEL (MEMS VCSEL) enables wavelength tuning by means of actuating its mirror, i.e., sweeping its cavity length mechanically [2]- [4].…”

Section: Introductionmentioning

confidence: 99%

Tuning Characteristics of Monolithic MEMS VCSELs With Oxide Anti-Reflection Layer

Nakahama

Sano

Inoue

et al. 2013

IEEE Photon. Technol. Lett.

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We demonstrate a micromachined tunable verticalcavity surface-emitting laser with a monolithically formed anti-reflection (AR) layer for highly efficient electro-thermal wavelength tuning. The AR layer is formed by the lateral oxidation of an aluminum-rich AlGaAs layer and no extra process is needed. We fabricated a micromachined GaAs verticalcavity surface-emitting laser and measured its wavelength tuning characteristic. The measurement result shows that the oxide layer functions as an AR layer for linear and efficient tuning characteristics. A large negative temperature dependence of wavelength from −0.24 to −2.0 nm/K was demonstrated using a thermally actuated cantilever for efficient electro-thermal wavelength tuning. An electro-thermal tuning efficiency of −2.3 to −4.8 nm/mW was obtained.Index Terms-Microelectromechanical devices, vertical cavity surface emitting lasers.

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“…[2][3][4][5][6] We proposed an athermal VCSEL with a thermally actuated cantilever based on a bimorph effect for making a temperature control unnecessary. [7] We reported the athermal operation of InP-based and GaAs-based MEMS VCSELs with a fixed wavelength even under ambient temperature changes thanks to the self-compensation based on a thermally actuated cantilever structure.…”

Section: Introductionmentioning

confidence: 99%

Athermal and tunable VCSELs with a thermally actuated cantilever structure for WDM optical interconnects

Sano

Nakata

Nakahama

et al. 2012

2012 2nd IEEE CPMT Symposium Japan

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We demonstrate the athermal operation and the wavelength tuning of 850nm GaAs-based vertical cavity surface emitting lasers with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables us to compensate the temperature drift of lasing wavelengths. A small temperature dependence of -0.011 nm/K and wavelength tuning of 4 nm were obtained with a newly designed T-shape membrane structure at the same time.

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High-sweep-rate 1310 nm MEMS-VCSEL with 150 nm continuous tuning range

Cited by 78 publications

References 8 publications

Recent advances in MEMS-VCSELs for high performance structural and functional SS-OCT imaging

Recent advances in MEMS-VCSELs for high performance structural and functional SS-OCT imaging

Tuning Characteristics of Monolithic MEMS VCSELs With Oxide Anti-Reflection Layer

Athermal and tunable VCSELs with a thermally actuated cantilever structure for WDM optical interconnects

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