High Temperature SAW Sensors on LiNbO<sub>3</sub> Substrate With SiO<sub>2</sub> Passivation Layer

Weng, Haotian; Duan, Franklin Li; Zhang, Yafei; Hu, Mingkai

doi:10.1109/jsen.2019.2937935

Cited by 19 publications

(7 citation statements)

References 14 publications

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“…The increase in protective layer thickness is beneficial for improving the high-temperature stability of LiNbO 3 SAW resonators [17], but different protective layer thicknesses can cause changes in surface acoustic wave vibration displacement. The SAW resonator utilizes Rayleigh waves, which are coupled by longitudinal wave L waves and vertical shear wave SV waves.…”

Section: Effect Of Protective Layer On the Propagation Characteristic...mentioning

confidence: 99%

Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study

Qiang,

Wenlong,

Chi

et al. 2023

J. Micromech. Microeng.

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In this paper, using LiNbO3 as the piezoelectric substrate, Pt as the electrode and SiO2 as the protective layer, a multi-physics field coupled finite element model was used to investigate the effect of the protective layer thickness on the Rayleigh wave propagation characteristics, and the relationship between the protective layer thickness and the frequency temperature coefficient TCF and electromechanical coupling coefficient K2 is established. The frequency characteristics of the device and the microscopic changes of the electrode and substrate structures under high temperature were analyzed experimentally. The results show that no acoustic mode shift occurs when the normalized thickness is less than 31.25%; As the thickness of the protective layer increases, the vibration displacement in the direction of L wave, SH wave and SV wave decreases, and the thickness of the protective layer can be increased appropriately to reduce the interference of SH wave to Rayleigh wave; |TCF| decreases with increasing thickness of the protective layer; Changes in the thickness of the protective layer at different temperatures lead to fluctuations in K2; As the temperature increases, the fluctuation of the resonant frequency of the SAW resonator increases; The SiO2protective layer can effectively protect LiNbO3 materials while improving the high-temperature working stability of Pt electrodes.

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Section: Effect Of Protective Layer On the Propagation Characteristic...mentioning

confidence: 99%

Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study

Qiang,

Wenlong,

Chi

et al. 2023

J. Micromech. Microeng.

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“…However, the upper temperature limit of the Pt RTD prepared by this process is 500 °C, which seriously restricts its application in hot-end components. On the other hand, Pt films always undergo rapid agglomeration and recrystallization above 500 °C, but the preparation of adhesion layers or protective layers helps improve their thermal stability at high temperatures. − For example, Zhao et al fabricated an Al 2 O 3 /ZrBN–SiCN/Al 2 O 3 composite film with a sandwich structure by reactive magnetron sputtering, and the stability of the Pt-13% Rh/Pt film thermocouple at 1000 °C was significantly improved . In addition, featured with high melting point (2690 °C) and excellent ablation resistance, yttria-stabilized zirconia (YSZ) could be a potential addition for high-temperature protective coating .…”

Section: Introductionmentioning

confidence: 99%

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Zeng

Chen

et al. 2022

ACS Appl. Mater. Interfaces

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In situ temperature monitoring of curved high-temperature components in extreme environments is challenging for a variety of applications in fields such as aero engines and gas turbines. Recently, extrusion-based direct ink writing (DIW) has been utilized to fabricate platinum (Pt) resistance temperature detectors (RTDs). However, the current Pt RTD prepared by DIW technology suffers from a limited temperature range and poor high-temperature stability. Here, DIW technology and yttria-stabilized zirconia (YSZ)-modified precursor ceramic film packaging have been used to build a Pt RTD with high-temperature resistance, small disturbance, and high stability. The results indicate that the protective layer formed by the liquid phase anchors the Pt particles and reduces the agglomeration and volatilization of the Pt sensitive layer at high temperature. Attributed to the SiCN/YSZ protective layer, the temperature resistance curve of the Pt RTD in the range of 50–800 °C has little deviation from the fitting curve, and the fitting correlation coefficient is above 0.9999. Interestingly, the Pt RTD also has high repeatability and stability. The high temperature resistance drift rate is only 0.05%/h after 100 h of long-term testing at 800 °C and can withstand butane flame up to ∼1300 °C without damage. Moreover, the Pt RTD can be conformally deposited on the outer ring of aerospace bearings by DIW technology and then realize on-site, nondestructive, and real-time monitoring of bearing temperature. The fabricated Pt RTD shows great potential for high-temperature applications, and the novel technology proposed provides a feasible pathway for temperature monitoring of aeroengine internal curved hot-end components.

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“…The wireless transmission is able to successfully transfer by the surface acoustic wave (SAW), Inductive Capacitive (LC), and Microwave Backscatter Temperature Sensors, avoiding cable packaging issues. Weng et al used SAW technology to design a temperature sensor, which can work stably between 20 and 800 °C and has good repeatability [ 7 ]. Boldeiu et al designed a temperature sensor based on GaN/SiC and GaN/sapphire SAW, which permit wide range, accurate temperature determinations.…”

Section: Introductionmentioning

confidence: 99%

Design and Research of Wireless Passive High-Temperature Sensor Based on SIW Resonance

Zhang

et al. 2022

Micromachines

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The temperature of advanced components in aviation and aerospace fields is difficult to obtain timely. In this study, we aimed to investigate microwave backscattering technology combined with the theory of substrate integrated waveguide and resonant cavity to design a wireless passive temperature sensor and explore its potential in this field. We employed silicon carbide and aluminum ceramic as the substrate to make sensors. The interrogation antenna was designed to test the sensor, which could completely cover the working frequency of the sensor and had good radiation characteristics. Based on the test results, the silicon carbide sensor was capable of bearing a temperature limit of about 1000 °C compared to the alumina sensor. From 25 °C to 500 °C, its sensitivity was 73.68 kHz/°C. Furthermore, the sensitivity was 440 kHz/°C in the range of 501 °C to 1000 °C. Moreover, we observed the surface of this sensor by using the scanning electron microscope, and the results showed that the damage to the sensor surface film structure caused by long-term high temperature is the major reason for the failure of the sensor. In conclusion, the performance of the silicon carbide sensor is superior to the alumina sensor.

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High Temperature SAW Sensors on LiNbO₃ Substrate With SiO₂ Passivation Layer

Cited by 19 publications

References 14 publications

Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study

Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Design and Research of Wireless Passive High-Temperature Sensor Based on SIW Resonance

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High Temperature SAW Sensors on LiNbO3 Substrate With SiO2 Passivation Layer

Cited by 19 publications

References 14 publications

Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study

Effect of SiO2 protective layer on LiNbO3 structured SAW resonators and temperature characteristics study

Thin-Film Platinum Resistance Temperature Detector with a SiCN/Yttria-Stabilized Zirconia Protective Layer by Direct Ink Writing for High-Temperature Applications

Design and Research of Wireless Passive High-Temperature Sensor Based on SIW Resonance

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High Temperature SAW Sensors on LiNbO₃ Substrate With SiO₂ Passivation Layer

Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study

Effect of SiO₂ protective layer on LiNbO₃ structured SAW resonators and temperature characteristics study