High thermal stability of ultra-high temperature surface acoustic wave devices with multilayer composite electrodes

Zhu, Daiqing; Zhang, Yihong; Xuan, Weipeng; Chen, Jinkai; Zhang, Miling; Zhang, Jikai; Jin, Hao; Dong, Shurong; Luo, Jikui

doi:10.1016/j.jallcom.2023.169056

Cited by 2 publications

(1 citation statement)

References 26 publications

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“…Fiber optic temperature sensors have strong anti-interference capabilities but require specific installation locations, which may be challenging given the limited space within the switchgear and may hinder their effectiveness. Passive wireless temperature sensors, on the other hand, can effectively overcome these challenges and have become a popular focus of current research [4]. SAW temperature sensors, with their advantages of small size, high sensitivity, easy integration, and the ability to be passive and wireless, have been widely applied in various fields, such as gas [5,6], humidity [7,8], and pressure [9,10].…”

Section: Introductionmentioning

confidence: 99%

Design and Characterization of Surface Acoustic Wave-Based Wireless and Passive Temperature Sensing System

Zhou,

Wang,

Lou

2024

Micromachines

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The surface acoustic wave (SAW) temperature sensor has received significant attention due to its wirelessly powered, battery-free, and chipless capabilities. This paper proposes a wireless sensing system comprising a one-port SAW resonator, helix antenna, and transceiver circuit. The SAW resonator used in this system is based on aluminum nitride (AlN) thin film, which exhibits high velocity and excellent piezoelectric properties. Simulations and experiments were conducted to investigate the performance of the designed SAW resonator. A helix antenna was also designed using finite element simulation to facilitate signal transmission between the SAW temperature sensor and the transceiver. An impedance-matching network was introduced between the helix antenna and the SAW resonator to optimize signal transmission. When the wireless SAW temperature sensor was placed within a certain distance of the mother antenna, the reflection peak of the SAW resonator was observed in the spectrum of the return signal. The frequency of the echo signal increased almost linearly as the temperature increased during the temperature tests. The fitted temperature coefficient of frequency (TCF) was −31.34 ppm/°C, indicating that the wireless temperature sensing system has high-temperature sensitivity.

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