High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Kim, Hyunseok; Liu, Yunpeng; Lu, Kuangye; Chang, Celesta S.; Sung, Dongchul; Akl, Marx; Qiao, Kuan; Kim, Ki-Seok; Park, Bo‐In; Zhu, Menglin; Suh, Jun Min; Kim, Jekyung; Jeong, Junseok; Baek, Yongmin; Ji, You Jin; Kang, Sungsu; Lee, Sangho; Han, Ne Myo; Kim, Chansoo; Choi, Chanyeol; Zhang, Mengjie; Choi, Hyeong-Kyu; Zhang, Yanming; Wang, Haozhe; Kong, Lingping; Afeefah, Nordin Noor; Ansari, M.N.M.; Park, Jungwon; Yeom, Geun Young; Kim, Sungkyu; Hwang, Jinwoo; Kong, Jing; Bae, Sang‐Hoon; Shi, Yunfeng; Hong, Suklyun; Kong, Wei; Kim, J.

doi:10.1038/s41565-023-01340-3

Cited by 28 publications

(50 citation statements)

References 41 publications

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“…Photograph of the three-times-reused substrate and the exfoliated GaN epilayers [ 67 ], h. Schematic of successive multiple membranes production by 2DLT and wafer recycling, i . Photographs of exfoliated membrane surface (top) and EBSD map (bottom) [ 68 ], j . X-ray rocking curves of AlN grown on sapphire (black line) and plasma treated-graphene/sapphire substrates (red line), k .…”

Section: Unprecedented Advantages Of Remote and Vdw Epitaxymentioning

confidence: 99%

“…Moreover, in order to improve harvest epitaxial layers, the method of growing multiple epitaxial membranes method has been researched as shown in Fig. 2 h [ 68 ]. In this method, 2D materials are directly formed on substrates in epitaxy systems, which enables an advanced remote epitaxy scheme comprised of multiple alternating layers of 2D materials and epitaxial layers that can be formed by a single epitaxy run.…”

Section: Unprecedented Advantages Of Remote and Vdw Epitaxymentioning

confidence: 99%

“…Applying an ultra-thin atomic layer between the epitaxial layer and substrate in the heteroepitaxy system is an important technology that can grow high crystal quality films without dislocation in not only lattice matched but also lattice mismatched conditions. In the vdW epitaxy method, the single-crystal thin films can be grown by effectively reducing the mismatch effect due to the weak bonding between III-N and graphene and alleviating the self-heating problem [ 12 , 14 , 68 – 71 ]. Liu et al successfully grew single-crystal AlN by improving III-N nucleation on graphene using plasma-treated graphene [ 72 ].…”

Section: Unprecedented Advantages Of Remote and Vdw Epitaxymentioning

confidence: 99%

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Applications of remote epitaxy and van der Waals epitaxy

et al. 2023

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Epitaxy technology produces high-quality material building blocks that underpin various fields of applications. However, fundamental limitations exist for conventional epitaxy, such as the lattice matching constraints that have greatly narrowed down the choices of available epitaxial material combinations. Recent emerging epitaxy techniques such as remote and van der Waals epitaxy have shown exciting perspectives to overcome these limitations and provide freestanding nanomembranes for massive novel applications. Here, we review the mechanism and fundamentals for van der Waals and remote epitaxy to produce freestanding nanomembranes. Key benefits that are exclusive to these two growth strategies are comprehensively summarized. A number of original applications have also been discussed, highlighting the advantages of these freestanding films-based designs. Finally, we discuss the current limitations with possible solutions and potential future directions towards nanomembranes-based advanced heterogeneous integration. Graphical Abstract

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Section: Unprecedented Advantages Of Remote and Vdw Epitaxymentioning

confidence: 99%

Section: Unprecedented Advantages Of Remote and Vdw Epitaxymentioning

confidence: 99%

Section: Unprecedented Advantages Of Remote and Vdw Epitaxymentioning

confidence: 99%

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Applications of remote epitaxy and van der Waals epitaxy

et al. 2023

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“…Recently, several emerging 2D materials with exotic attributes have provided further opportunities, 38,117,122 such as 2D van der Waals materials with vanished interlayer coupling for scalable nonlinear optical applications, 365 quasi-2D perovskites with high crystallinity, 37,40,122 and ferroelectricity and ferromagnetism in atomically thin van der Waals layered materials. [366][367][368][369] Due to their quantum confinement of charge carriers and excitons 400 (d) Single-crystalline 3D nanomembranes on graphene nanopatterns for film exfoliation and substrate recycling. 387 (b) Reconfigurable hetero-integrated optoelectronic systems with embedded artificial intelligence using vertically stacked optical layers like Lego bricks on a chip.…”

Section: Perspectivesmentioning

confidence: 99%

“…68,396,397 Nanomembrane mass production could also be enabled with a reduced cost. 387,[398][399][400] By combining the 2D and 3D van der Waals material building blocks, vast playgrounds also unfold for 2D-materials-based photonic integrated circuits 3,4,25,66,279 (Fig. 5a), exotic nanophotonic polaritons in hybrid heterostructures 2,58,59 (Fig.…”

Section: Perspectivesmentioning

confidence: 99%

Functionalizing nanophotonic structures with 2D van der Waals materials

Meng,

Zhong,

et al. 2023

Nanoscale Horiz.

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MatGPT: A Vane of Materials Informatics from Past, Present, to Future

Wang,

Chen,

Tao

et al. 2023

Advanced Materials

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Combining materials science, artificial intelligence (AI), physical chemistry and other disciplines, materials informatics is continuously accelerating the vigorous development of new materials. The emergence of “GPT AI” shows that the scientific research field has entered the era of intelligent civilization with “data” as the basic factor and “algorithm + computing power” as the core productivity. The continuous innovation of AI will impact the cognitive laws and scientific methods, and reconstruct the knowledge and wisdom system. This leads us to think more about materials informatics, both in terms of opportunities and challenges. In this review, we provide a comprehensive discussion of AI models, materials infrastructures, and review the current advances in the discovery and design of new materials. With the rise of new research paradigms triggered by “AI for Science”, we propose the vane of materials informatics: “MatGPT”, and carry out the technical path planning from the aspects of data, descriptors, generative models, pre‐training models, directed design models, collaborative training, experimental robots, as well as the efforts and preparations needed to develop a new generation of materials informatics. Finally, we discuss the challenges and constraints faced by materials informatics, in order to achieve a more digital, intelligent and automated construction of materials informatics with the joint efforts of more interdisciplinary scientists. This article is protected by copyright. All rights reserved

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High-throughput manufacturing of epitaxial membranes from a single wafer by 2D materials-based layer transfer process

Cited by 28 publications

References 41 publications

Applications of remote epitaxy and van der Waals epitaxy

Applications of remote epitaxy and van der Waals epitaxy

Functionalizing nanophotonic structures with 2D van der Waals materials

MatGPT: A Vane of Materials Informatics from Past, Present, to Future

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