Abstract-In this paper, a broadband bow-tie slot antenna is presented. The coplanar waveguide (CPW) fed antenna is fabricated on an InP substrate for same chip integration with the promising resonant tunnelling diode (RTD) terahertz (THz) oscillator which has the capability of room temperature operation and with relative high power. The antenna exhibits a very wide bandwidth (return loss S11 <-10 dB) around the design frequency (300 GHz). However, the radiation pattern is degraded because of the large dielectric constant of the InP substrate. A technique to overcome this problem employing a reflector ground plane underneath a thin substrate of low dielectric constant is presented. Initial simulation results of this technique are reported and experimental validation at lower frequency (17 GHz) shows the feasibility of the concept.