Polymer-assisted deposition is a chemical solution route to high quality thin films. In this process, the polymer controls the viscosity and binds metal ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of crack-free and uniform films after thermal treatment. We review our recent effort to epitaxially grow metal-nitride thin films, such as hexagonal GaN, cubic TiN, AlN, NbN, and VN, mixed-nitride Ti 1x Al x N, ternary nitrides tetragonal SrTiN 2 , BaZrN 2 , and BaHfN 2 , hexagonal FeMoN 2 , and nanocomposite TiN-BaZrN 2 .