Highly conductive SnO₂ thin films for flat‐panel displays

Abstract

Abstract— SnO2 is considered to be a promising alternative material for indium tin oxide (ITO), which is used for thin‐film transparent electrodes in flat‐panel displays (FPDs) and is facing a serious indium depletion problem. However, annealing processes in the manufacture of plasma‐display panels (PDPs), which are major FPDs, cause high resistivity in SnO2 films. To obtain lower resistivity after the annealing processes, the relationship between deposition conditions and resistivity and the influences of annealing on resistivity, both theoretically and experimentally, were investigated. As a solution, a method involving the formation of a coating of SiO2 on SnO2 is proposed, and a SnO2 resistivity as low as 6.60 × 10−5 Ω‐m was obtained after annealing.

Control of SnO2 films by epitaxy and helium implantation

“…The ability to verify final product, indicate and establish the contaminants, and observe the integrity of surfaces is crucial to correlating performance characteristics with composition. Semiconductor thin films have recently received a great scientific interest because of its wide range of applications like gas sensors [1], dye-sensitized solar cells [2], ion-sensitive field effect transistors [3], catalysts [4], and transparent electrodes for flat panel displays [5]. Semiconducting tin oxide SnO 2 is also widely used in optoelectronic devices, s, photoelectron chemical devices, and solar photovoltaic (PV) cells where it was observed that composition and defects strongly influence the performance [6].…”

Microstructure and Photoluminescence Studies of Sb-Doped SnO2 Zigzag Nanobelts

“…Because the one-dimensional SnO 2 nano-material has special gas-sensing, light transmittance and electric conduction characteristics, 1 it becomes an ideal material candidate swiftly for gas sensors, 2-4 transparent electrodes, 5 6 light emitter diode, 7 flat-panel display 8 and thin film solar cell 9 etc. Furthermore, after it is doped by some impurities, SnO 2 nano-material has more extensive use because of the emergence of some better performances.…”

High Heat Proofing Nano-Layered Film Cu Wiring Using Crystal Grain Growth Control

“…For these reasons, we studied Cr/SnO 2 [3][4][5] as a protective layer. In this case, Cr is an adhesive layer.…”