Highly ordered hexagonally arranged sub‐200 nm diameter vertical cylindrical pores on p‐type Si using non‐lithographic pre‐patterning of the Si substrate

Zacharatos, Filimon; Gianneta, V.; Nassiopoulou, A. G.

doi:10.1002/pssa.200881111

Cited by 10 publications

(15 citation statements)

References 18 publications

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“…Recently porous anodic alumina was used for pre-patterning of the silicon surface to promote the formation of ordered porous silicon structures [63,64]. Generally porous silicon is formed by anodization of a silicon wafer in an HF-containing electrolyte.…”

Section: Fabrication Of Porous Silicon By Anodic Dissolution Of Bumentioning

confidence: 99%

Porous Silicon—A Versatile Host Material

2010

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This work reviews the use of porous silicon (PS) as a nanomaterial which is extensively investigated and utilized for various applications, e.g., in the fields of optics, sensor technology and biomedicine. Furthermore the combination of PS with one or more materials which are also nanostructured due to their deposition within the porous matrix is discussed. Such nanocompounds offer a broad avenue of new and interesting properties depending on the kind of involved materials as well as on their morphology. The filling of the pores performed by electroless or electrochemical deposition is described, whereas different morphologies, reaching from micro- to macro pores are utilized as host material which can be self-organized or fabricated by prestructuring. For metal-deposition within the porous structures, both ferromagnetic and non-magnetic metals are used. Emphasis will be put on self-arranged mesoporous silicon, offering a quasi-regular pore arrangement, employed as template for filling with ferromagnetic metals. By varying the deposition parameters the precipitation of the metal structures within the pores can be tuned in geometry and spatial distribution leading to samples with desired magnetic properties. The correlation between morphology and magnetic behaviour of such semiconducting/magnetic systems will be determined. Porous silicon and its combination with a variety of filling materials leads to nanocomposites with specific physical properties caused by the nanometric size and give rise to a multiplicity of potential applications in spintronics, magnetic and magneto-optic devices, nutritional food additives as well as drug delivery.

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Section: Fabrication Of Porous Silicon By Anodic Dissolution Of Bumentioning

confidence: 99%

Porous Silicon—A Versatile Host Material

2010

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“…At present, well ordered macropores arrays cannot be formed because nucleation occurs at random, leading to overlapping and hence non homogeneous pore wall thickness. From the literature, it is clear that much is to gain from using patterns of pits produced by standard lithography or masking techniques and subsequent etching 11, 24. By this mean we should avoid overlapping and make larger macropores in order to further decrease the reflectivity and fully benefit from their light scattering properties.…”

Section: Discussionmentioning

confidence: 99%

Photoelectrochemical etching of cone‐shaped macropores in N‐type Si for solar cell texturization

Wang

Tebib

Veschetti

et al. 2010

Physica Status Solidi (a)

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Macropore formation by photoelectrochemical (PEC) etching of N-type crystalline Si under front side illumination has been investigated. We report on two important parameters that influence the pore morphology: the applied anodic bias and the spectral distribution of the illumination source. On (100) c-Si, the pore morphology changes from a round shape at low bias (0 V/NHE) to a conical shape at high bias (2 V/NHE). In the latter case we show that, by adjusting the spectrum of the white light source with longpass filters of different cut-on wavelengths, we can control the cone angle of the pores from 508 with white light to 108 with infrared light. Optical measurements indicate that macropores formed with a narrow cone angle (208) could be of interest for Si solar cell texturization since they result in a very low reflectivity (2.6% at 800 nm) and in an efficient light trapping.

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“…Porous silicon, a versatile material, which has been discovered in the mid 1950s (Uhlir, 1956) and has been extensively investigated in the 1990s (Canham, 1990;Lehmann and Gösele, 1991;Koshida and Koyama, 1992;Zhang, 2001), is nowadays still an often-employed material in many research fields. After Canham showed in 1990 that microporous silicon emits light in the visible at room temperature due to quantum confinement, optoelectronic applications have been under intense discussion.…”

Section: Introductionmentioning

confidence: 99%

Physical Properties of Semiconducting/Magnetic Nanocomposites

Granitzer

Rumpf

2015

Front. Mater.

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In this review, the fabrication of porous silicon/magnetic nanocomposite materials and their physical properties are elucidated. Especially, the investigation of the presented systems with respect to their magnetic properties is reported. Furthermore, the influence of the semiconducting matrix on the properties of the nanocomposites is highlighted. The main focus will be put on silicon used as template material. In general, the nanocomposite systems are fabricated in a two-step process, first by anodization of a silicon wafer to achieve porous silicon structures, and second by electrodeposition of a magnetic material into the pores. The morphology of the porous silicon template offers straight pores, grown perpendicular to the wafer surface. The magnetic nanostructures deposited within the pores lead to specific properties of the composite dependent on their size and shape. Due to their mutual arrangement, magnetic coupling between these structures can occur, whereas, coupling between adjacent pores depends on the porous silicon morphology. In the first section, different types of such template/metal systems are reviewed and second an experimental part follows implying the porous silicon formation as well as the subsequent metal deposition process. Third, the magnetic and optical properties of the systems are described. In the fourth chapter, the influence of the semiconducting matrix on these properties is elucidated and finally some prospects and conclusions are addressed.

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Highly ordered hexagonally arranged sub‐200 nm diameter vertical cylindrical pores on p‐type Si using non‐lithographic pre‐patterning of the Si substrate

Cited by 10 publications

References 18 publications

Porous Silicon—A Versatile Host Material

Porous Silicon—A Versatile Host Material

Photoelectrochemical etching of cone‐shaped macropores in N‐type Si for solar cell texturization

Physical Properties of Semiconducting/Magnetic Nanocomposites

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