2012
DOI: 10.1002/jsid.111
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Highly reliable a‐IGZO TFTs on a plastic substrate for flexible AMOLED displays

Abstract: We have successfully reduced threshold voltage shifts of amorphous In–Ga–Zn–O thin‐film transistors (a‐IGZO TFTs) on transparent polyimide films against bias‐temperature stress below 100 mV, which is equivalent to those on glass substrates. This high reliability was achieved by dense IGZO thin films and annealing temperature below 300 °C. We have reduced bulk defects of IGZO thin films and interface defects between gate insulator and IGZO thin film by optimizing deposition conditions of IGZO thin films and ann… Show more

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Cited by 70 publications
(44 citation statements)
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“…As shown in Figure 5(b), all devices emitted yellow light without defects even after being detached from a glass substrate. [14,15,16,17] After detachment process, we performed a bending test on the PLEDs device. In order to confirm that the PLED on the flexible CPI substrate has no significant degradation under bending test, we measured the performance of the device before and after bending test at the radius of 4 mm.…”
Section: Resultsmentioning
confidence: 99%
“…As shown in Figure 5(b), all devices emitted yellow light without defects even after being detached from a glass substrate. [14,15,16,17] After detachment process, we performed a bending test on the PLEDs device. In order to confirm that the PLED on the flexible CPI substrate has no significant degradation under bending test, we measured the performance of the device before and after bending test at the radius of 4 mm.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, polyimide was chosen as the base material to develop our flexible AMOLED. However, even for the high‐heat‐resistant polyimide, the processing temperature that it can sustain is still limited at a maximum temperature of 350–400 °C . Therefore, to realize the flexible AMOLEDs, TFT backplanes with a maximum processing temperature within 400 °C (or even lower) should be developed.…”
Section: Fabrication Of Flexible Amoledsmentioning
confidence: 99%
“…But, perhaps, optical transparency at very high processing temperature is arguably the primary requirement. As an example, in the fabrication of flexible active matrix organic light emitting display devices (AMOLEDs), the processing temperature on the flexible polymer film substrates could be higher than 300 °C …”
Section: Introductionmentioning
confidence: 99%