Highly Selective Guiding Springs for Large Displacements in Surface MEMS

Schmitt, Philip; Schmitt, Lisa; Tsivin, Nick; Hoffmann, Martin

doi:10.1109/jmems.2021.3074822

Cited by 13 publications

(21 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, in wafer plane off-axis direction the high stiffness of these springs ensures a purely translational guiding of the system. Thereby, the selectivity of the sinusoidal spring decreases with an increasing amplitude of the sinusoids [20].…”

Section: System Design Based On the Guiding Springmentioning

confidence: 96%

“…With each actuator, the initial gap increases, so the last actuator a j has the largest initial electrode gap x j . A main sinusoidal guiding spring k g [20] is directly connected to the last actuator and guarantees a pure translational system displacement x system,i . The connecting spring k 1 and the guiding spring k g are coupled to the substrate of the chip.…”

Section: System Functionmentioning

confidence: 99%

“…Sinusoidal guiding springs [20] as shown in Figure 4a are well-suited for the stepwise systems as they feature a very low stiffness in deflection direction lowering the pull-in voltage. However, in wafer plane off-axis direction the high stiffness of these springs ensures a purely translational guiding of the system.…”

Section: System Design Based On the Guiding Springmentioning

confidence: 99%

“…In this contribution, we present microsystems consisting of numerous flexible electrostatic bending plate actuators linked in a chain and achieving large displacements of up to 230.7 ± 0.9 µm at 54 V. In Section 2, we present the system function and derive the analytical transfer function to model microsystems with multiple steps. We focus on the sinusoidal guiding springs [20] and their huge influence on the system displacement. In Section 3, we show the fabrication of the systems featuring 5, 8, 10, 13, and 16 steps which are based on a dicing-free SOI-technology [21][22][23].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation

Schmitt

Hoffmann

2021

Actuators

Self Cite

View full text Add to dashboard Cite

We present the design, fabrication, and experimental characterization of microsystems achieving large and stepwise discrete displacements. The systems consist of electrostatic bending plate actuators linked in a chain with increasing electrode gaps to allow a stepwise system displacement. A derived analytic transfer function permits to evaluate the influence of the system components on both the total and the stepwise system displacement. Based on calculation and simulation results, systems featuring 5, 8, 10, 13, and 16 steps are modeled and fabricated using a dicing-free SOI-fabrication process. During experimental voltage- and time-dependent system characterization, the minimum switching speed of the electrostatic actuators is 1 ms. Based on the guiding spring stiffness and the switching time, step-by-step and collective activations of the microsystems are performed and the system properties are derived. Furthermore, we analyze the influence of the number of steps on the total system displacement and present 16-step systems with a total maximum displacement of 230.7 ± 0.9 µm at 54 V.

show abstract

Section: System Design Based On the Guiding Springmentioning

confidence: 96%

Section: System Functionmentioning

confidence: 99%

Section: System Design Based On the Guiding Springmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation

Schmitt

Hoffmann

2021

Actuators

Self Cite

View full text Add to dashboard Cite

show abstract

“…Serpentine springs [8,14] are commonly used. Considering the ratio of the spring rate in axial and off-axial direction, triangular springs [15] are also well suited. However, by implementing linear springs, the constant force characteristic of the actuator system can be affected, since the restoring force is usually an almost linear function of displacement.…”

Section: Non-linear Spring Systemmentioning

confidence: 99%

Design and Characterization of an Electrostatic Constant-Force Actuator Based on a Non-Linear Spring System

et al. 2021

Self Cite

View full text Add to dashboard Cite

In recent years, tissue engineering with mechanical stimulation has received considerable attention. In order to manipulate tissue samples, there is a need for electromechanical devices, such as constant-force actuators, with integrated deflection measurement. In this paper, we present an electrostatic constant-force actuator allowing the generation of a constant force and a simultaneous displacement measurement intended for tissue characterization. The system combines a comb drive structure and a constant-force spring system. A theoretical overview of both subsystems, as well as actual measurements of a demonstrator system, are provided. Based on the silicon-on-insulator technology, the fabrication process of a moveable system with an extending measurement tip is shown. Additionally, we compare measurement results with simulations. Our demonstrator reaches a constant-force of 79 ± 2 μN at an operating voltage of 25 V over a displacement range of approximately 40 μm, and the possibility of adjusting the constant-force by changing the voltage is demonstrated.

show abstract

Design of a MEMS-Based Low Stiffness Accelerometer for Measuring Gravitational Anomalies

Tariq,

Bazaz,

Shakoor

et al. 2024

J. Vib. Eng. Technol.

View full text Add to dashboard Cite

Highly Selective Guiding Springs for Large Displacements in Surface MEMS

Cited by 13 publications

References 28 publications

Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation

Large Stepwise Discrete Microsystem Displacements Based on Electrostatic Bending Plate Actuation

Design and Characterization of an Electrostatic Constant-Force Actuator Based on a Non-Linear Spring System

Design of a MEMS-Based Low Stiffness Accelerometer for Measuring Gravitational Anomalies

Contact Info

Product

Resources

About