Highly Sensitive AlN Contour-Mode Resonator-Based Pressure Sensor for In-Line Monitoring of Chemical Reactions

Zuo, Jingjing; Zhang, Hainan; Chang, Ye; Liang, Ji; Duan, Xuexin

doi:10.1109/transducers.2019.8808326

Cited by 4 publications

(1 citation statement)

References 13 publications

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“…A design based on a contour-mode resonator (CMR) was experimentally verified for measurements in the 0-200 kPa pressure range. Offering enhanced linearity, the device achieved a sensitivity of 16.51 Hz/hPa [129]. Additionally, the recent use of flexible and biocompatible materials has made it possible to use smart sensors and electronic skins (e-skins) for advancements in applications such as human-machine interaction and wearable systems for health monitoring [130].…”

Section: Industrial Applicationsmentioning

confidence: 99%

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

et al. 2023

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Piezoelectric materials have attracted considerable attention over the last two decades because many technologies utilize their core properties of piezoelectric materials. Previous applications consisted of bulk structures; however, a shift towards better performance and a more simplified and compatible fabrication method are required. Aluminum nitride (AlN) is a material that fits these criteria; it has a non-centrosymmetric crystal structure with a polarized c-axis and exhibits piezoelectric properties. Furthermore, it has an added benefit as the fabrication process of AIN is compatible with complementary metal-oxide semiconductor technology. This has led to a rapid increase in the adoption and interest in AlNbased devices. In this review, the crystal structure of AlN and its piezoelectric properties are compared with those of aluminum scandium nitride. Subsequently, functional devices such as consumer-based devices, telecommunication-based devices, industrial-related applications, and medical applications are presented. Finally, a summary and discussion of the future AlN research are presented.

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Section: Industrial Applicationsmentioning

confidence: 99%

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

et al. 2023

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Epitaxial AIN/AIN bimorph piezocantilevers for geothermal monitoring

Panyutin,

Sharofidinov,

Kremleva

et al. 2024

E3S Web Conf.

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The problem of early and reliable prediction of earthquakes, which can lead to catastrophic consequences, is far from being solved, so it remains extremely topical. The next step towards its solution, as it is supposed, could be the creation of a network of sensors located in the hot deep layers of geothermal systems and capable of continuous monitoring of geophysical parameters characterizing the activity of magma. In this paper we propose the use of matrices of thermally stable bimorph piezocantilevers formed on the basis of epitaxial AlN/AlN structures and allowing the possibility of excitation of acoustic waves of various types as a universal platform for the subsequent creation of various sensors capable of operating in high-temperature and chemically aggressive environments. Since in static modes the main manifestation of the inverse piezo effect is the appearance of bending deformations, for preliminary estimation of the geometrical parameters of such cantilevers, a mathematical model of the change in the deflection value was constructed, and a computational algorithm (MATLAB environment) was developed to make it possible to obtain the optimal ratios between the thicknesses of active AlN layers from the point of view of minimizing the control stresses.

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Design and Simulation of Piezoelectric Resonator for Sensor Application

Kariyappa

et al. 2024

2024 International Conference on Intelligent Algorithms for Computational Intelligence Systems (IACIS)

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Highly Sensitive AlN Contour-Mode Resonator-Based Pressure Sensor for In-Line Monitoring of Chemical Reactions

Cited by 4 publications

References 13 publications

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

A Review of the Recent Applications of Aluminum Nitride-Based Piezoelectric Devices

Epitaxial AIN/AIN bimorph piezocantilevers for geothermal monitoring

Design and Simulation of Piezoelectric Resonator for Sensor Application

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