2004
DOI: 10.1143/jjap.43.l277
|View full text |Cite
|
Sign up to set email alerts
|

Highly Texturized Silver Electrode Deposition Using Roll-to-Roll Low-Temperature Sputtering Process

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
12
0

Year Published

2004
2004
2017
2017

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 28 publications
(12 citation statements)
references
References 0 publications
0
12
0
Order By: Relevance
“…These self‐organized textures have feature sizes in the range of sub‐micron to several microns depending on the process conditions. In the substrate configuration, various light scattering textures have been developed such as rough metallic surfaces . Light absorption enhancement using periodic textures has been also intensively investigated .…”
Section: Device Designmentioning
confidence: 99%
“…These self‐organized textures have feature sizes in the range of sub‐micron to several microns depending on the process conditions. In the substrate configuration, various light scattering textures have been developed such as rough metallic surfaces . Light absorption enhancement using periodic textures has been also intensively investigated .…”
Section: Device Designmentioning
confidence: 99%
“…Recently, it has been found that a tandem-type TFSSC with a top a-Si:H cell and a bottom c-Si: H cell requires more efficient light trapping owing to the limited light absorption of c-Si: H in the infrared ͑IR͒ region. 1,2 For this purpose, textured substrates have been implemented in TFSSC, including SnO 2 , 3,4 ZnO, 5,6 Ag, 7,8 and Al. 9 In general, light trapping is enhanced by increasing either the feature size or the aspect ratio of the surface textures.…”
mentioning
confidence: 99%
“…Inclusion of Al in sputtered Ag for substrate type of cells allows to bring down the processing temperature of textured Ag to below 300°C [5] from the usual~350-400°C used for pure Ag [3]. Using Al doped Ag reflectors Fuji Electric has been able to make thin film silicon solar cells on high temperature resistant plastics (polyimide) in a roll to roll process [6], however, the processing temperature is still too high for cheap plastics such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN) or polycarbonate (PC). Texture etching with diluted HCl of sputter deposited ZnO:Al on plastics has allowed such substrates in combination with conformal coating of thin Ag layer to be used as back reflector in n-i-p solar cells [6].…”
Section: Introductionmentioning
confidence: 99%
“…Using Al doped Ag reflectors Fuji Electric has been able to make thin film silicon solar cells on high temperature resistant plastics (polyimide) in a roll to roll process [6], however, the processing temperature is still too high for cheap plastics such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN) or polycarbonate (PC). Texture etching with diluted HCl of sputter deposited ZnO:Al on plastics has allowed such substrates in combination with conformal coating of thin Ag layer to be used as back reflector in n-i-p solar cells [6]. One of the issues is that the substrate suffers from heavy stress due to the ZnO:Al sputter deposition.…”
Section: Introductionmentioning
confidence: 99%