Highly Tunable Electrothermally and Electrostatically Actuated Resonators

Hajjaj, Amal Z.; Alcheikh, Nouha; Ramini, Abdallah; Hafiz, Abdullah Al; Younis, Mohammad I.

doi:10.1109/jmems.2016.2542338

Cited by 52 publications

(39 citation statements)

References 33 publications

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“…Therefore, devices with tensile stress are suitable for high frequency applications. Such tensile stress can be induced by the gate voltage when the actuation gap of the device is greater than five times the diameter of the CNT [53], however, at the cost of higher actuation voltage. The simulated pull-in voltages range from few tens to hundreds of volts limiting their integration with CMOS-devices as static switches.…”

Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of MWCNT-Based Bridge Devices

Chappanda

Batra

Holguín‐Lerma

et al. 2017

IEEE Trans. Nanotechnology

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Abstract-Carbon nanotubes (CNTs) are one of the most actively researched structural materials due to their interesting electrical, mechanical, and chemical properties. Unlike single walled carbon nanotubes (SWCNTs), little work has been focused on multi-walled carbon nanotubes (MWCNTs) and their potential for practical devices. Here, we have fabricated bridgeshape devices integrating MWCNTs (> 50 nm in outer diameter) using three processes: optical lithography, electron beam-induced platinum deposition, and surface micromachining. Each device consists of a doubly-clamped nanotube suspended over gold electrodes on a highly conductive Si substrate. The suspended nanotubes are characterized individually using Raman spectroscopy and semiconductor parameters analysis and, overall, show, high crystallinity and low electrical resistance. The spring constants of doubly-clamped nanotubes were characterized using atomic force microscopy force−displacement measurements, with values as high as 70 N/m observed. Highly stiff MWCNTs are promising for a variety of applications, such as resonators and electrical interconnects. Through simulations, we estimate the resonance frequencies and pull-in voltages of these suspended nano-structures. The dependence of key parameters, such as the nanotube's length, Young's modulus, axial stress, and wall thickness is also discussed.

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Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of MWCNT-Based Bridge Devices

Chappanda

Batra

Holguín‐Lerma

et al. 2017

IEEE Trans. Nanotechnology

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“…The other beam is actuated below buckling such that the cubic nonlinearity is dominant. 4,36 The cubic nonlinearity is a result of the beam midplane stretching generated at moderate deflection levels.…”

Section: (B)mentioning

confidence: 99%

“…36 This can be used to compensate for fabrication imperfections considering that the operating frequencies of the resonators are critical to the proposed technique for filtering. It is worth mentioning here that the nonlinear response of the resonator differs in the forward and backward sweeps resulting in hysteresis in the response.…”

Section: (B)mentioning

confidence: 99%

Exploiting nonlinearities of micro-machined resonators for filtering applications

Ilyas

Chappanda

Younis

2017

Applied Physics Letters

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We demonstrate the exploitation of the nonlinear behavior of two electrically coupled microbeam resonators to realize a band-pass filter. More specifically, we combine their nonlinear hardening and softening responses to realize a near flat pass band filter with sharp roll-off characteristics. The device is composed of two near identical doubly clamped and electrostatically actuated microbeams made of silicon. One of the resonators is buckled via thermal loading to produce a softening frequency response. It is then further tuned to create the desired overlap with the second resonator response of hardening behavior. This overlapping improves the pass band flatness. Also, the sudden jumps due to the softening and hardening behaviors create sharp roll-off characteristics. This approach can be promising for the future generation of filters with superior characteristics.

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“…Such resonators have been also proposed for numerous applications, such as mass/gas sensors [2,3], memory elements [4,5], logic devices [6,7], gyroscopes [8], energy harvesters [9], and signal processing elements [10,11]. Generally, the resonance frequency of a resonator can be tuned by changing its stiffness through applied axial loads, which can be applied by electrostatic [12], electromagnetic [13], or electrothermal [14] actuations. Recent studies have shown tunability of doubly-clamped microbeam resonators by axially controlling their stiffness electrostatically [12] and electrothermally [14].…”

Section: Introductionmentioning

confidence: 99%