The interpretation of Raman spectra of GaSb can be complicated by the presence of a so-called surface space charge region (SSCR), resulting in an inhomogeneous near-surface Raman scattering environment. To fully interpret Raman spectra, it is important to have an understanding of the SSCR profile relative to the Raman probe depth. However, a priori determination of even the actual SSCR width is not always possible for GaSb under a wide range of doping levels. The primary objective of this report is to provide a convenient reference to aid in the determination of relative contributions to an observed GaSb Raman spectrum of SSCR scattering and bulk scattering for a range of excitation wavelengths, doping levels, and SSCR widths and types. Hence, Raman spectra of both n-type and p-type doped GaSb epilayers were obtained using 488 nm, 514.5 nm, 647.1 nm, and 752.55 nm excitation radiation. Both n-type and p-type doped GaSb epilayers were selected for investigation because these layers exhibit the two different SSCR types that are typically encountered with as-grown GaSb and relatedThe Lincoln Laboratory portion of this work was sponsored by the Department of Energy (DOE), under Air Force contact number FA8721-05-C-0002. The opinions, interpretations, conclusions and recommendations are those of the authors and are not necessarily endorsed by the United States Government.2 materials. A range of doping levels were examined for each doping type so as to examine the effects of a varying SSCR width on the observed spectra. A secondary objective of this report is to demonstrate the performance of a spectroscopic system based on 752.55 nm excitation that is sensitive to bulk carrier properties in n-type and p-type doped GaSb epilayers over a wide doping range, unlike visible wavelength-based optical systems.
Index Headings:GaSb; Raman spectroscopy; surface space charge region; depletion layer; accumulation layer; n-type doping, p-type doping * Corresponding author: e-mail: jmaslar@nist.govPhone: 301-975-4182
INTRODUCTIONGaSb and related alloy semiconductors, e.g., GaInAsSb and GaInSb, are of interest for mid-infrared sources and detectors and low-power, high-speed electronic devices.
1-3Characterization of these materials at various stages of device fabrication is critical to fabrication process development and a variety of metrologies have been employed for this purpose, [1][2][3] including Raman spectroscopy. 1,3 Raman spectroscopy can potentially be used to probe numerous materials properties of semiconductor materials, including crystal quality, alloy composition, and carrier concentration and mobility. 4 Although Raman spectroscopy is a potentially useful technique for characterizing a variety of GaSb material properties, the interpretation of Raman spectra of GaSb and related materials can be complicated by the inhomogeneous nature of the near-surface Raman scattering environment. Compound semiconductor materials exhibit a so-called surface space-charge 3 region (SSCR) that develops because of the presence of charge-...