2004
DOI: 10.1063/1.1789275
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Homoepitaxial diamond growth for the control of surface conductive carrier transport properties

Abstract: Growth of high quality diamond for surface conductive device applications is demonstrated. Mobility values higher than 140 cm 2 V −1 s −1 at sheet carrier concentrations of 2.5ϫ 10 12 cm −2 were achieved using a high growth rate process. Furthermore, control over the carrier transport statistics is demonstrated on both single crystal and polycrystalline diamond. This process allows the production of high quality electronic grade diamond with ability to tune carrier transport statistics. The mechanism behind th… Show more

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Cited by 9 publications
(1 citation statement)
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“…Through CVD methods, single crystal diamond substrates (SCD) with orientation of (100) and (111) were grown and used (Element Six, Ltd). Prior to use, substrates were cleaned in strongly oxidizing solutions to remove any residual organic contaminants and/or adsorbate-hydrogenated surface complexes contributing to surface conductivity [18,19]. To clean the diamond the etch solution consisted of sulphuric acid and ammonium persulphate and the rinse solution was a mixture of hydrogen peroxide and ammonium hydroxide.…”
Section: Cvd Graphene Transferred Onto Diamondmentioning
confidence: 99%
“…Through CVD methods, single crystal diamond substrates (SCD) with orientation of (100) and (111) were grown and used (Element Six, Ltd). Prior to use, substrates were cleaned in strongly oxidizing solutions to remove any residual organic contaminants and/or adsorbate-hydrogenated surface complexes contributing to surface conductivity [18,19]. To clean the diamond the etch solution consisted of sulphuric acid and ammonium persulphate and the rinse solution was a mixture of hydrogen peroxide and ammonium hydroxide.…”
Section: Cvd Graphene Transferred Onto Diamondmentioning
confidence: 99%