Homogeneity of Residual Layer thickness in UV Nanoimprint Lithography

Hiroshima, Hiroshi; Atobe, Hidemasa

doi:10.1143/jjap.48.06fh18

Cited by 10 publications

(11 citation statements)

References 16 publications

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“…Hiroshima and Atobe [12] found that resist flows only at the region boundary from regions with low density to that with high density in UV nanoimprint by a stamp with both different pattern densities and feature pitches, which can be complemented by our simulation results. The residual resist would flow across the whole patterned field from the region of low pattern density to that of high density if keeping feature pitch constant.…”

Section: Results Of the Non-uniform Pattern (Quartz Mould)supporting

confidence: 71%

“…He found that high imprint pressure, a thin initial layer, and high fluidity of resist help to form a thin and uniform residual layer. In addition, Hiroshima and Atobe [12] observed that smooth flowing of the resist after filling can homogenise the residual layer. They also proposed a capacity‐equalised mould to reduce the negative effect of pattern density on imprint quality [13].…”

Section: Introductionmentioning

confidence: 99%

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Effect of stamp design on residual layer thickness and contact pressure in UV nanoimprint lithography

Yin

Sun

Wang

2018

Micro & Nano Letters

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Pattern density is an important factor in UV nanoimprint stamp design. Various pattern densities may affect the thickness of the residual layer and its uniformity. This work investigated the effect of pattern density as well as other stamp parameters, including stamp material, stamp thickness and cavity height, on residual layer thickness (RLT), contact pressure, and imprint quality. Two kinds of stamps were designed for simulation, one with detached uniform lines and the other with adjacent non-uniform lines. Results show that areas near the edges of the imprint field in all stamps are the first to achieve high contact pressure. The study observed that long imprint time enables a reduction of RLT after a stable period, particularly obvious with high density. For a long-term imprint of patterns with various densities, flowing behaviour of the residual resist was revealed. These conclusions are beneficial for making guidelines for stamp design in UV nanoimprint lithography.

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Section: Results Of the Non-uniform Pattern (Quartz Mould)supporting

confidence: 71%

Section: Introductionmentioning

confidence: 99%

Effect of stamp design on residual layer thickness and contact pressure in UV nanoimprint lithography

Yin

Sun

Wang

2018

Micro & Nano Letters

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“…Using the obtained nano-scale structure as a mold and nanoimprint technology, we transferred the structure onto UV-curable acrylic polymers [11,12]. The nanoimprinting method is described in Fig.…”

Section: Producing Antifouling Sheets For Stentsmentioning

confidence: 99%

The Study of Bile Duct Stent Having Antifouling Properties Using Biomimetics Technique

Sekiguchi

Nishino

Aikawa

et al. 2019

J. Photopol. Sci. Technol.

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Biomimetics is a field of technologies based on imitating the functions and properties found in living organisms. The application of the super-water-repellent fine structure of lotus leaves to create waterproof products is a well-known example of biomimetics. The present study examined the surface structure of snail shells, which exhibit oleophobic properties oil repellency and explored the feasibility of recreating this structure on the inner surfaces of conventional biliary stents. Observations of snail shells under an electron microscope show a covering of extremely fine protrusions of around 200 nm in size. When water enters the pores between these fine protrusions, a film of water exhibiting supernanohydrophilic structure forms on the shell. Because water and oil are immiscible, this film repels oil. We would expect stent occlusion to be less likely with a biliary stent having this structure on its inner surface. Biliary stricture caused by bile duct cancer or bile duct obstruction can lead to icterus and may, in serious cases, induce fatal hepatic failure. A surgical procedure that places indwelling biliary stents inside the biliary tract is sometimes performed to secure a passage for bile flow. However, conventional stents are prone to occlusion due to the accumulation of biliary sludge, resulting in the need for a second surgery to replace the stent. This problem is attributable to the polyethylene used to make the biliary stents; polyethylene is susceptible to the adhesion of cholesterol and fats found in the bile, eventually leading to stent occlusions. This paper reports our efforts to develop biliary stents that feature antifouling properties inspired by biomimetics to address this problem; specifically, the development of oleophobic inner stent surfaces featuring supernanohydrophilic structures inspired by snail shell surfaces.

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“…Using the obtained nano-porous structure as a mold, we transferred the structure onto UV-curable acrylic polymers using nanoimprint technology [7,8]. Figure 8 shows the nanoimprinting method [9,10].…”

Section: Transfer Experiments To Polymermentioning

confidence: 99%

Study of the Antifouling Polymer Sheet which used Biomimetics Technique

Sekiguchi

Matsumoto

Minami

et al. 2018

J. Photopol. Sci. Technol.

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It has long been known that snail shells have an excellent anti-fouling function, as it is said that there are no dirty snails. The snails encountered during the baiu rainy season in Japan always have clean, shining shells. These shells are known to have convex-concave nanoscale structures on their surface (roughness on the order of approximately 200 nm) that promote the formation of a film of water on the shell surface, creating an ultra-hydrophilic nanoscale structure that repels oils and stains. Creating such an ultra-hydrophilic nanoscale structure on a polymer surface should allow us to produce an antifouling polymer sheet. Additionally, producing a tube from a polymer film with this nanoscale structure should make it possible to create a tube with high antifouling properties. The field of technologies based on imitating properties and structures observed in living organisms in nature is called biomimetics. This paper reports on the development of antifouling sheets and tubes with antifouling functions fabricated using the above technologies. The first step was creating a mold with an artificial snail shell structure using ZrO2 nanoparticles, whose patterns were then transferred to polymer with nanoimprint technology. These antifouling sheets and tubes are expected to see wide use for medical applications.

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Homogeneity of Residual Layer thickness in UV Nanoimprint Lithography

Cited by 10 publications

References 16 publications

Effect of stamp design on residual layer thickness and contact pressure in UV nanoimprint lithography

Effect of stamp design on residual layer thickness and contact pressure in UV nanoimprint lithography

The Study of Bile Duct Stent Having Antifouling Properties Using Biomimetics Technique

Study of the Antifouling Polymer Sheet which used Biomimetics Technique

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