The carrier concentrations and mobilities of impurity (Sb, In, Ga, Al, Ag, and Cu)-doped BaSi 2 films grown by molecular beam epitaxy on highly resistive nor p-Si(111) substrates were measured at room temperature using the van der Pauw technique. Sb-, Ga-and Cu-doped BaSi 2 exhibited n-type conductivity, while In-Al-and Ag-doped BaSi 2 exhibited p-type conductivity. The temperature dependence of resistivity indicated that the carrier transport in Ga-, Al-, Ag-, and Cu-doped BaSi 2 is well explained by both Shklovskii-Efros-type and Mott-type variable range hopping conduction.