2007
DOI: 10.1364/oe.15.017967
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Horizontal single and multiple slot waveguides: optical transmission at λ = 1550 nm

Abstract: We experimentally demonstrate the optical transmission at 1550 nm of the fundamental slot modes (quasi-TM modes) in horizontal single and multiple slot waveguides and ring resonators consisting of deposited amorphous silicon and silicon dioxide. We demonstrate that the horizontal multiple slot configuration provides enhanced optical confinement in low index slot regions compared to a horizontal single slot structure with the same total SiO2 layer thickness by comparing their thermo-optic coefficients for the h… Show more

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Cited by 191 publications
(110 citation statements)
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“…Device optimization and maximal light-matter interaction are pushing the silicon technology to explore subwavelength architectures where optical processes can be strongly enhanced by nanophotonic design [7,8] The effect of a plasmonic antenna on a propagating optical mode inside a dielectric waveguide, however, is largely unexplored. Pioneering numerical calculations by Bruck et al Here we present a simple analytical model and numerical investigations of the scattering properties of a single plasmonic nanoantenna embedded in a single-mode silicon waveguide for operation at telecom wavelengths (Fig.…”
Section: Introductionmentioning
confidence: 99%
“…Device optimization and maximal light-matter interaction are pushing the silicon technology to explore subwavelength architectures where optical processes can be strongly enhanced by nanophotonic design [7,8] The effect of a plasmonic antenna on a propagating optical mode inside a dielectric waveguide, however, is largely unexplored. Pioneering numerical calculations by Bruck et al Here we present a simple analytical model and numerical investigations of the scattering properties of a single plasmonic nanoantenna embedded in a single-mode silicon waveguide for operation at telecom wavelengths (Fig.…”
Section: Introductionmentioning
confidence: 99%
“…On top of this, SiO 2 can be deposited through plasma enhanced chemical vapor deposition (PECVD) [11]. Following that a low-loss hydrogenated amorphous silicon (a-Si) layer can be deposited followed by a thin SiO 2 layer deposition, which can act as a hard mask, by using PECVD [11].…”
Section: Resultsmentioning
confidence: 99%
“…In fact, the latter can be fabricated by using thermal oxidation or deposition of different layers. By this way, the quasi TM-mode is not affected by surface roughness and propagation losses can be significantly reduced, down to 6.3 ± 0.2 dB/cm, 7.0 ± 0.2 dB/cm for a single and multiple slot waveguides, respectively (Sun et al, 2007). In Fig.…”
Section: State Of the Art Of Slot Waveguides Designed For Chemical Sementioning
confidence: 85%