2007
DOI: 10.1088/0960-1317/18/1/015008
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Hot embossing/bonding of a poly(ethylene terephthalate) (PET) microfluidic chip

Abstract: Poly(ethylene terephthalate) (PET) has a low glass transition temperature. Therefore it has significant applications in fields where low bonding temperature is needed. But PET microfluidic chip production using a hot embossing/bonding method has rarely been reported. In this study, hot embossing was conducted for a micro-feature's fabrication on a PET substrate, and a special temperature-pressure profile was used to achieve high replication accuracy without a vacuum; plasma surface treatment was used to improv… Show more

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Cited by 81 publications
(44 citation statements)
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“…This hot embossing technique has been applied to the fabrication of microchips [27,28]. Although inexpensive and durable templates can be used in this relatively easy-to-operate embossing method [29], various templates still need different temperature-pressure profiles, which have better replication accuracy in the hot embossing process [30]. For the thermal bonding technique, which can obtain a higher bonding strength, the separation channel for gravitational field flow fractionation has a low depth/width, which is similar to those of microchips [31].…”
Section: Open Accessmentioning
confidence: 99%
“…This hot embossing technique has been applied to the fabrication of microchips [27,28]. Although inexpensive and durable templates can be used in this relatively easy-to-operate embossing method [29], various templates still need different temperature-pressure profiles, which have better replication accuracy in the hot embossing process [30]. For the thermal bonding technique, which can obtain a higher bonding strength, the separation channel for gravitational field flow fractionation has a low depth/width, which is similar to those of microchips [31].…”
Section: Open Accessmentioning
confidence: 99%
“…Compared with PDMS, thermoplastic is a rigid polymer material that can be shaped or reshaped upon heating above the glass transition temperature (T g ). Myriad thermoplastic materials, such as polycarbonate (PC) [14][15][16], polymethyl methacrylate (PMMA) [17][18][19], cyclic olefin polymers (COPs) [20][21][22][23], polystyrene (PS) [24][25][26], and polyethylene terephthalate (PET) [27,28] have been employed in microfluidics. Among them, COPs have high optical transmissivity, satisfactory solvent and acid and base resistivity, and glass-like properties.…”
Section: Introductionmentioning
confidence: 99%
“…Among the various polymer materials used in microfluidic systems, thermoplastics such as polycarbonate (PC), polymethylmethacrylate (PMMA), polyethylene terephthalate (PET), polyvinylchloride (PVC), and cyclic olefin copolymer (COC) are the most commonly used polymers because of their good mechanical strength, optical transmissivity, chemical resistance, and biological compatibility performance. Researchers have developed a wide variety of thermoplastic replication methods, including hot embossing (Greener et al 2010;Juang et al 2002;Li et al 2008;Martynova et al 1997) thermoforming (Dreuth and Heiden 1999;Truckenmuller et al 2002) and injection molding (Attia et al 2009;McCormick et al 1997), to fabricate polymer microfluidic chips. Using polymer replicas created by hot embossing is the most widely applied approach.…”
Section: Introductionmentioning
confidence: 99%