Hot Embossing of Polymer Optical Waveguides for Sensing Applications

Rezem, Maher; Günther, Axel; Rahlves, Maik; Roth, Bernhard; Reithmeier, Eduard

doi:10.1016/j.protcy.2014.09.011

Cited by 37 publications

(23 citation statements)

References 19 publications

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“…2 (right) and similar to the one described in [4]. Here, the cover slide including the Ormocomp structures are only used as hot embossing stamp to transfer a negative copy of the structures obtained by the lithographic process into the PMMA sheet.…”

Section: Fabrication Processmentioning

confidence: 99%

“…The backbones of almost all photonic devices are light guiding structures such as optical waveguides. While the fabrication of optical waveguides was mainly done by semiconductor fabrication technologies in the past, the focus has recently been shifted to polymer based optics [3][4][5][6][7][8][9]. Polymers offer several advantages regarding fabrication cycles and, therefore, fabrication costs.…”

Section: Introductionmentioning

confidence: 99%

“…In addition, there exist a vast range of technologies that generate microstructures in polymers to form waveguides and sensing elements depending on their specific field of operation and feature size. A process being capable of high-throughput rates based on reel-to-reel setups is hot embossing [3][4][5]. The process relies on a master stamp commonly made from silicon or metal which is transferred into a polymer substrate.…”

Section: Introductionmentioning

confidence: 99%

“…After cooling, the polymer substrate is released and contains grooves which are filled with a core material in a liquid monomer state. A rigid waveguide is formed by curing the monomer either thermally or by applying UV radiation [4,5]. Hot embossing is an adequate fabrication method for a high throughput rate but due to the required embossing stamp it is hardly adaptable to generate micro-geometries other than provided by the specific stamp.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of polymer based integrated photonic devices by maskless lithography

Rahlves

2016

SPIE Proceedings

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We present our recent results on the fabrication of photonic devices such as single-mode and few-mode waveguides, Ycouplers as well as integrated interferometric sensor devices. The devices were created by means of a fabrication method based on maskless lithography, which allows for fabricating embedded integrated polymer elements on a scale of several square centimeters with a resolution down to one micron. We demonstrate the versatility of our approach by presenting first results on photonic structures created by maskless lithography.

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Section: Fabrication Processmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fabrication of polymer based integrated photonic devices by maskless lithography

Rahlves

2016

SPIE Proceedings

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“…Fabrikasi dan karakterisasi pandu gelombang optik berbahan polymer telah banyak dilakukan, dikarenakan kemudahan dalam pembentukannya dan biaya produksi yang relatif murah [1][2][3][4]. Penggunaan polimer sebagai bahan pandu gelombang mempunyai beberapa keunggulan antara lain: proses fabrikasi relatif mudah dan dapat dicetak pada suhu rendah, sifat bias rangkap rendah, dan kekuatan mekaniknya bagus [5,6].…”

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Fabrikasi Pandu Gelombang Lima Lapis Berbasis Polimer Polystyrene (PS) dan Polymethyl Methacrylate (PMMA)

Faridawati

2015

JFA

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IntisariTelah dilakukan penelitian untuk memfabrikasi pandu gelombang slab lima lapis berbasis bahan polimer polystyrene (PS) 3%, dan polymethyl methacrylate (PMMA) 2%, dengan menggunakan metode spin coating. Komposisi pandu gelombang lima lapis yang dibuat terdiri dari bahan PS sebagai film dengan indeks bias bahan 1,59 dan bahan PMMA sebagai kover dan gap (pemisah) dengan indeks bias 1,49. Berdasarkan hasil fabrikasi didapatkan ketebalan 7,4µm untuk PS sebagai film dan 10,93µm untuk PMMA sebagai kover serta 4,84µm untuk PMMA sebagai pembatas. Dua pandu gelombang tersebut dapat digunakan sebagai directional coupler. AbstractFabrication of five-layer waveguides with slab structur based on polymer materials polystyrene (PS) 3% and polymethyl methacrylate (PMMA) 2% using the spin coating method has been carried out. The composition of five-layer waveguides were polystyrene as film with a refractive index 1.59 and PMMA as cover and gap with refractive index of 1.49. Based on the results obtained thickness 7.4µm fabrication for polystyrene film and 10.93µm for PMMA as a cover and 4.84µm for PMMA as a gap. Two waveguides are expected to be used as a directional coupler.KATA KUNCI: waveguides, polystyrene, PMMA, spin coating, directional coupler I. PENDAHULUANFabrikasi dan karakterisasi pandu gelombang optik berbahan polymer telah banyak dilakukan, dikarenakan kemudahan dalam pembentukannya dan biaya produksi yang relatif murah [1][2][3][4]. Penggunaan polimer sebagai bahan pandu gelombang mempunyai beberapa keunggulan antara lain: proses fabrikasi relatif mudah dan dapat dicetak pada suhu rendah, sifat bias rangkap rendah, dan kekuatan mekaniknya bagus [5,6].Beberapa bahan polimer yang lazim digunakan sebagai pandu gelombang optik berstruktur slab diantaranya polystyrene (PS) dan polymethyl methacrylate (PMMA). Pandu gelombang optik slab dapat difabrikasi dengan beberapa metode, salah satunya adalah metode spin coating. Metode ini dilakukan dengan meneteskan suatu larutan pada sebuah substrat, kemudian memutarnya dengan kecepatan tertentu.Pada paper ini dilaporkan hasil fabrikasi pandu gelombang optik struktur slab lima lapis dengan menggunakan metode spin coating, dengan hasil sesuai yang diharapkan sebagai syarat pandu gelombang moda tunggal, dengan tebal lapisan kedua dan keempat yang bertindak sebagai film memiliki ketebalan yang lebih tipis bila dibandingkan dengan lapisan * E-MAIL: Faridawati.farida80@gmail.com pertama dan lapisan kelima yang bertindak sebagai kover. Lapisan ketiga yang bertindak sebagai gap dibuat setipis mungkin agar ketika pandu gelombang difungsikan bisa terjadi kopling. II. METODOLOGIPada penelitian ini telah dilakukan fabrikasi pandu gelombang slab lima lapis dengan substrat kaca dan susunan lapisan PMMA-PS-PMMA-PS-PMMA dengan menggunakan metode spin coating. Metode spin coating merupakan metode yang cukup mudah namun sudah mampu menghasilkan lapisan yang baik. Susunan pandu gelombang lima lapis yang difabrikasi diharapkan menjadi dua pandu gelombang simetri dengan PS sebagai film sedangk...

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