Electroluminescence from Er-doped Si-rich silicon nitride light emitting diodes Appl. Phys. Lett. 97, 081109 (2010); 10.1063/1.3483771Resonant structures based on amorphous silicon suboxide doped with Er 3 + with silicon nanoclusters for an efficient emission at 1550 nm Current transport and electroluminescence mechanisms in thin SiO 2 films containing Si nanocluster-sensitized erbium ionsThis study reports on the investigation and characterization of the different emitting centers within SiO 2 codoped by Er 3+ ions and silicon-excess. Erbium doped silicon-rich silicon oxide ͑SRSO:Er͒ thin films, fabricated by magnetron cosputtering at 500°C, were analyzed by means of cathodoluminescence. The CL spectra of SRSO, Er-doped SiO 2 and SRSO:Er were recorded and compared for various annealing temperatures. It was found that some specific optically-active point-defects called silicon-oxygen-deficient centers ͑SiODCs͒ are present in all kinds of samples. In the layers containing some excess Si, the phase separation between Si nanoclusters ͑Si-ncs͒ and SiO 2 is observed when the annealing temperature reaches and exceeds 900°C. The formation of Si-nc increases with annealing at the expense of SiODCs that was assumed to act as seeds for the growth of Si-nc. For SRSO:Er samples, the contribution of SiODCs overlaps that due to Er 3+ transitions in the visible range. The emissions from SiODCs are drastically reduced when an SRSO sample is doped with Er ions, whereas the Er emissions in the visible range start to be distinctly observed. We propose a scenario of energy transfer from SiODCs toward the Er ions, especially as the emissions from the Si-based entities ͑SiODCs, Si-nc͒ and from some transitions of Er ions are located in a same visible broad range.