2021
DOI: 10.1116/6.0001278
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Hybrid cross correlation and line-scan alignment strategy for CMOS chips electron-beam lithography processing

Abstract: In this paper, we show an alignment strategy based on a hybrid strategy using cross correlation and line-scan alignment to address the challenge for CMOS integrated circuit postprocessing using electron-beam lithography. Due to design rules imposed by the foundries at the 130 nm node and below, classical line-scan alignment is not possible, and marker shapes are limited. The shape of the marker is essential for cross-correlation alignment. By measuring accurately the alignment offset between two lithography st… Show more

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