Spectroscopic interrogation of materials in the midinfrared with nanometer spatial resolution is inherently difficult due to the long wavelengths involved, reduced detector efficiencies, and limited availability of spectrally bright, coherent light sources. Technological advances are driving techniques that overcome these challenges, enabling material characterization in this relatively unexplored spectral regime. Synchrotron infrared nanospectroscopy (SINS) is an imaging technique that provides local sample information of nanoscale target specimens in an experimental energy window between 330 and 5000 cm −1 . Using SINS, we analyzed a series of individual gold nanorods patterned on a SiO 2 substrate and on a flake of hexagonal boron nitride. The SINS spectra reveal interactions between the nanorod photonic Fabry-Pérot resonances and the surface phonon polaritons of each substrate, which are characterized as avoided crossings. A coupled oscillator model of the hybrid system provides a deeper understanding of the coupling and provides a theoretical framework for future exploration.

Trimer meta-atoms composed of three gold rods in an equilateral triangular geometry were fabricated, and their near-field plasmonic responses were characterized via electron energy loss (EEL), cathodoluminescence (CL), and stimulated electron energy loss/gain (sEEL/sEEG) spectroscopy. The trimer structure hybridizes into a low-energy mode with all three rods coupling in-phase, which produces a circulating current and thus a magnetic field. The next highest-energy mode consists of two rods coupling out-of-phase and produces a net electric dipole. We investigate the near fields of hybridized magnetic and electric modes via EEL and CL and correlate their spectral characteristics and intensity maps. Then, by changing the length of the trimer rods, we tune the magnetic and electric modes to our laser energy and characterize the excited state via sEEL/sEEG spectroscopy. Exploration of the tilt dependence, relative to the optical source, of the two modes reveals that the electric mode sEEG intensity increases more than the expected sin 2 (θ) dependence of the optical electric field coupling (see the Supporting Information for a detailed description). After correcting for the tail of the close-proximity electric mode, we demonstrate sEEG via coupling of the magnetic component of the optical field to the magnetic meta-atoms, which has the expected cos 2 (θ) tilt dependence. This realization opens the possibility to explore the nanoscale excited-state near-field imaging of other magnetic meta-atom structures.

In this paper, we show an alignment strategy based on a hybrid strategy using cross correlation and line-scan alignment to address the challenge for CMOS integrated circuit postprocessing using electron-beam lithography. Due to design rules imposed by the foundries at the 130 nm node and below, classical line-scan alignment is not possible, and marker shapes are limited. The shape of the marker is essential for cross-correlation alignment. By measuring accurately the alignment offset between two lithography steps with different marker shapes compatible with the design rules, we tested the influence of the marker shape in the performance of the cross-correlation alignment. We present a method based on a white noise generated array to design high-performance markers for cross correlation, compatible with CMOS technology, by increasing the sharpness of their autocorrelation peak. We show that the alignment performances can even be improved using a hybrid strategy with cross-correlation and line-scan alignment and reaches a mean offset of 5.2 nm on a CMOS substrate.