2009
DOI: 10.1016/j.proche.2009.07.095
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Hybrid microfluidic cartridge formed by irreversible bonding of SU-8 and PDMS for multi-layer flow applications

Abstract: SU-8 and polydimethylsiloxane (PDMS) are both transparent materials with properties very convenient for rapid prototyping of microfluidic systems. However, previous efforts of combining these two materials failed due to poor adhesion between them. Herein, we introduce a promising low-temperature technique (< 100 °C) to irreversibly bond two or more structured layers of SU-8 and PDMS to create hybrid stacks. This offers new possibilities in design and fabrication of enclosed three-dimensional microstructures an… Show more

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Cited by 23 publications
(15 citation statements)
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“…The assembled device was kept at 70 C under a force of 30-60 N for 15 min. 19 The devices were removed from the hotplate, and tygon tubing (ID: 0.02 in., OD: 0.06 in.) was inserted into the inlets and outlets of the device.…”
Section: Device Assemblymentioning
confidence: 99%
“…The assembled device was kept at 70 C under a force of 30-60 N for 15 min. 19 The devices were removed from the hotplate, and tygon tubing (ID: 0.02 in., OD: 0.06 in.) was inserted into the inlets and outlets of the device.…”
Section: Device Assemblymentioning
confidence: 99%
“…2c). 29 The unstructured PDMS layer comprises punched fluidic inlets and outlets, and its surface has to be activated by oxygen plasma (200 Plasma System, TePla AG, Germany) before assembly. It is important to notice, that for the final channel sealing, no precise alignment is required so that it can be performed under a conventional stereomicroscope.…”
Section: Device Fabricationmentioning
confidence: 99%
“…Several earlier reports presented bonding solutions with moderate adhesion between different polymers and PDMS applying subsequent O 2 or N 2 plasma treatments and possible silanisation steps utilising various organosilanes. [19,20,21,22] These bonding experiments were reproduced and evaluated to find an optimal method to seal our photonic and microfluidic subsystems.…”
Section: Microfabricationmentioning
confidence: 99%