“…The conversion step from CH 3 radical to CH 4 molecule during room-temperature-target chemical sputtering of graphite by energetic hydrogen ions has not been conclusively identified [8], and, moreover, has not been successfully incorporated into current chemical sputtering MD simulations [9,10]. The hydrocarbon release mechanism during room-temperature chemical sputtering is still the subject of discussion, ranging from projectile-induced kinetic ejection [3,9], to purely diffusive release [6,7]. In addition, there are unresolved technical issues leading to differences between various measurement techniques [11] for determination of the total C chemical sputtering yield.…”