“…38,39) Initially, aSiGe:H was adopted for bottom cell materials; however, this material shows severe photoinduced degradation. 40) Recently, c-Si:H or c-SiGe:H has been proposed as promising candidates for bottom cell materials, [41][42][43] because they do not exhibit photoinduced degradation. In this proposal, a high rate growth of these materials is crucial for low-cost fabrication of tandem solar cells, since c-Si:H as well as c-SiGe:H essentially has an indirect optical-transition nature.…”