Hydrogenation of zirconium film by implantation of hydrogen ions

Abstract

In order to understand the drive-in target in a D-D type neutron generator, it is essential to study the mechanism of the interaction between hydrogen ion beams and the hydrogen-absorbingmetal film. The present research concerns the nucleation of hydride within zirconium film implanted with hydrogen ions. Doses of 30 keV hydrogen ions ranging from 4.30×10 17 to 1.43×10 18 ions cm −2 were loaded into the zirconium film through the ion beam implantation technique. Features of the surface morphology and transformation of phase structures were investigated with scanning electron microscopy, atomic force microscopy and x-ray diffraction. Confirmation of the formation of δ phase zirconium hydride in the implanted samples was first made by x-ray diffraction, and the different stages in the gradual nucleation and growth of zirconium hydride were then observed by atomic force microscope and scanning electron microscopy.

Investigation of working pressure on the surface roughness controlling technology of glow discharge polymer films based on the diagnosed plasma

“…As a result, the holes and asperities on the film surface decrease as the etching effects of the hydrocarbon fragments are weakened. Meanwhile, as the deposition rate of the film decreases in this condition, there is more relaxation time for fragment migration [32]. It reduces the number of hole defects, and results in a decrease of the film surface roughness.…”